7/26/2010	8:31:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	8:31:09 AM	Recipe started at 8:31 AM
7/26/2010	8:31:09 AM	Helium valve closed
7/26/2010	8:31:09 AM	H2 valve closed
7/26/2010	8:31:09 AM	BCl3 valve closed
7/26/2010	8:31:09 AM	PH3 valve closed
7/26/2010	8:31:09 AM	SiCl4 pre valve closed
7/26/2010	8:31:09 AM	SiCl4 post valve closed
7/26/2010	8:31:09 AM	Main Vac valve closed
7/26/2010	8:31:09 AM	Bypass valve closed
7/26/2010	8:31:09 AM	Bubbler valve closed
7/26/2010	8:31:09 AM	Helium MFC set to  0.000000
7/26/2010	8:31:09 AM	H2 MFC set to  0.000000
7/26/2010	8:31:09 AM	BCl3 MFC set to  0.000000
7/26/2010	8:31:09 AM	PHl3 MFC set to  0.000000
7/26/2010	8:31:09 AM	SiCl4 MFC set to  0.000000
7/26/2010	8:31:09 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:31:10 AM	Tube furnace set to 0
7/26/2010	8:31:10 AM	Run finished at 8:31 AM
7/26/2010	8:31:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	8:31:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	8:31:35 AM	Recipe started at 8:31 AM
7/26/2010	8:31:35 AM	Helium valve closed
7/26/2010	8:31:35 AM	H2 valve closed
7/26/2010	8:31:35 AM	BCl3 valve closed
7/26/2010	8:31:35 AM	PH3 valve closed
7/26/2010	8:31:35 AM	SiCl4 pre valve closed
7/26/2010	8:31:35 AM	SiCl4 post valve closed
7/26/2010	8:31:35 AM	Main Vac valve closed
7/26/2010	8:31:35 AM	Bubbler valve closed
7/26/2010	8:31:35 AM	Bypass valve opened
7/26/2010	8:31:35 AM	Helium MFC set to  0.000000
7/26/2010	8:31:35 AM	H2 MFC set to  0.000000
7/26/2010	8:31:35 AM	BCl3 MFC set to  0.000000
7/26/2010	8:31:35 AM	PHl3 MFC set to  0.000000
7/26/2010	8:31:35 AM	SiCl4 MFC set to  0.000000
7/26/2010	8:31:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:31:35 AM	Tube furnace set to 0
7/26/2010	8:31:35 AM	Helium valve closed
7/26/2010	8:31:35 AM	H2 valve closed
7/26/2010	8:31:35 AM	BCl3 valve closed
7/26/2010	8:31:35 AM	PH3 valve closed
7/26/2010	8:31:35 AM	SiCl4 pre valve closed
7/26/2010	8:31:35 AM	SiCl4 post valve closed
7/26/2010	8:31:35 AM	Bubbler valve closed
7/26/2010	8:31:35 AM	Main Vac valve opened
7/26/2010	8:31:35 AM	Bypass valve opened
7/26/2010	8:31:35 AM	Helium MFC set to  0.000000
7/26/2010	8:31:35 AM	H2 MFC set to  0.000000
7/26/2010	8:31:35 AM	BCl3 MFC set to  0.000000
7/26/2010	8:31:35 AM	PHl3 MFC set to  0.000000
7/26/2010	8:31:35 AM	SiCl4 MFC set to  0.000000
7/26/2010	8:31:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:31:35 AM	Tube furnace set to 0
7/26/2010	8:31:36 AM	Run finished at 8:31 AM
7/26/2010	8:31:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	8:31:41 AM	Recipe started at 8:31 AM
7/26/2010	8:31:41 AM	Helium valve closed
7/26/2010	8:31:41 AM	BCl3 valve closed
7/26/2010	8:31:41 AM	PH3 valve closed
7/26/2010	8:31:41 AM	SiCl4 pre valve closed
7/26/2010	8:31:41 AM	SiCl4 post valve closed
7/26/2010	8:31:41 AM	Main Vac valve closed
7/26/2010	8:31:41 AM	Bypass valve closed
7/26/2010	8:31:41 AM	Bubbler valve closed
7/26/2010	8:31:41 AM	H2 valve opened
7/26/2010	8:31:41 AM	Helium MFC set to  0.000000
7/26/2010	8:31:41 AM	H2 MFC set to  500.000000
7/26/2010	8:31:41 AM	BCl3 MFC set to  0.000000
7/26/2010	8:31:41 AM	PHl3 MFC set to  0.000000
7/26/2010	8:31:41 AM	SiCl4 MFC set to  0.000000
7/26/2010	8:31:41 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:31:41 AM	Tube furnace set to 0
7/26/2010	8:33:04 AM	Helium valve closed
7/26/2010	8:33:04 AM	BCl3 valve closed
7/26/2010	8:33:04 AM	PH3 valve closed
7/26/2010	8:33:04 AM	SiCl4 pre valve closed
7/26/2010	8:33:04 AM	SiCl4 post valve closed
7/26/2010	8:33:04 AM	Main Vac valve closed
7/26/2010	8:33:04 AM	Bypass valve closed
7/26/2010	8:33:04 AM	H2 valve opened
7/26/2010	8:33:04 AM	Bubbler valve opened
7/26/2010	8:33:04 AM	Helium MFC set to  0.000000
7/26/2010	8:33:04 AM	H2 MFC set to  500.000000
7/26/2010	8:33:04 AM	BCl3 MFC set to  0.000000
7/26/2010	8:33:04 AM	PHl3 MFC set to  0.000000
7/26/2010	8:33:04 AM	SiCl4 MFC set to  0.000000
7/26/2010	8:33:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:33:04 AM	Tube furnace set to 1000
7/26/2010	8:53:04 AM	Helium valve closed
7/26/2010	8:53:04 AM	PH3 valve closed
7/26/2010	8:53:04 AM	Main Vac valve closed
7/26/2010	8:53:04 AM	Bypass valve closed
7/26/2010	8:53:04 AM	H2 valve opened
7/26/2010	8:53:04 AM	BCl3 valve opened
7/26/2010	8:53:04 AM	SiCl4 pre valve opened
7/26/2010	8:53:04 AM	SiCl4 post valve opened
7/26/2010	8:53:04 AM	Bubbler valve opened
7/26/2010	8:53:04 AM	Helium MFC set to  0.000000
7/26/2010	8:53:04 AM	H2 MFC set to  500.000000
7/26/2010	8:53:04 AM	BCl3 MFC set to  6.000000
7/26/2010	8:53:04 AM	PHl3 MFC set to  0.000000
7/26/2010	8:53:04 AM	SiCl4 MFC set to  50.000000
7/26/2010	8:53:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:53:04 AM	Tube furnace set to 1000
7/26/2010	9:08:04 AM	H2 valve closed
7/26/2010	9:08:04 AM	BCl3 valve closed
7/26/2010	9:08:04 AM	PH3 valve closed
7/26/2010	9:08:04 AM	SiCl4 pre valve closed
7/26/2010	9:08:04 AM	SiCl4 post valve closed
7/26/2010	9:08:04 AM	Main Vac valve closed
7/26/2010	9:08:04 AM	Bypass valve closed
7/26/2010	9:08:04 AM	Helium valve opened
7/26/2010	9:08:04 AM	Bubbler valve opened
7/26/2010	9:08:04 AM	Helium MFC set to  500.000000
7/26/2010	9:08:04 AM	H2 MFC set to  0.000000
7/26/2010	9:08:04 AM	BCl3 MFC set to  0.000000
7/26/2010	9:08:04 AM	PHl3 MFC set to  0.000000
7/26/2010	9:08:04 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:08:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:08:05 AM	Tube furnace set to 0
7/26/2010	9:28:05 AM	Helium valve closed
7/26/2010	9:28:05 AM	H2 valve closed
7/26/2010	9:28:05 AM	BCl3 valve closed
7/26/2010	9:28:05 AM	PH3 valve closed
7/26/2010	9:28:05 AM	SiCl4 pre valve closed
7/26/2010	9:28:05 AM	SiCl4 post valve closed
7/26/2010	9:28:05 AM	Main Vac valve closed
7/26/2010	9:28:05 AM	Bypass valve closed
7/26/2010	9:28:05 AM	Bubbler valve closed
7/26/2010	9:28:05 AM	Helium MFC set to  0.000000
7/26/2010	9:28:05 AM	H2 MFC set to  0.000000
7/26/2010	9:28:05 AM	BCl3 MFC set to  0.000000
7/26/2010	9:28:05 AM	PHl3 MFC set to  0.000000
7/26/2010	9:28:05 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:28:05 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:28:05 AM	Tube furnace set to 0
7/26/2010	9:28:05 AM	Run finished at 9:28 AM
7/26/2010	9:36:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	9:36:00 AM	Recipe started at 9:36 AM
7/26/2010	9:36:00 AM	H2 valve closed
7/26/2010	9:36:00 AM	BCl3 valve closed
7/26/2010	9:36:00 AM	PH3 valve closed
7/26/2010	9:36:00 AM	SiCl4 pre valve closed
7/26/2010	9:36:00 AM	SiCl4 post valve closed
7/26/2010	9:36:00 AM	Main Vac valve closed
7/26/2010	9:36:00 AM	Bypass valve closed
7/26/2010	9:36:00 AM	Bubbler valve closed
7/26/2010	9:36:00 AM	Helium valve opened
7/26/2010	9:36:00 AM	Helium MFC set to  500.000000
7/26/2010	9:36:00 AM	H2 MFC set to  0.000000
7/26/2010	9:36:00 AM	BCl3 MFC set to  0.000000
7/26/2010	9:36:00 AM	PHl3 MFC set to  0.000000
7/26/2010	9:36:00 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:36:00 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:36:00 AM	Tube furnace set to 0
7/26/2010	9:36:04 AM	Helium valve closed
7/26/2010	9:36:04 AM	H2 valve closed
7/26/2010	9:36:04 AM	BCl3 valve closed
7/26/2010	9:36:04 AM	PH3 valve closed
7/26/2010	9:36:04 AM	SiCl4 pre valve closed
7/26/2010	9:36:04 AM	SiCl4 post valve closed
7/26/2010	9:36:04 AM	Main Vac valve closed
7/26/2010	9:36:04 AM	Bypass valve closed
7/26/2010	9:36:04 AM	Bubbler valve closed
7/26/2010	9:36:04 AM	Helium MFC set to  0.000000
7/26/2010	9:36:04 AM	H2 MFC set to  0.000000
7/26/2010	9:36:04 AM	BCl3 MFC set to  0.000000
7/26/2010	9:36:04 AM	PHl3 MFC set to  0.000000
7/26/2010	9:36:04 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:36:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:36:04 AM	Tube furnace set to 0
7/26/2010	9:36:04 AM	Run finished at 9:36 AM
7/26/2010	9:36:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	9:43:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	9:43:29 AM	Recipe started at 9:43 AM
7/26/2010	9:43:29 AM	Helium valve closed
7/26/2010	9:43:29 AM	H2 valve closed
7/26/2010	9:43:29 AM	BCl3 valve closed
7/26/2010	9:43:29 AM	PH3 valve closed
7/26/2010	9:43:29 AM	SiCl4 pre valve closed
7/26/2010	9:43:29 AM	SiCl4 post valve closed
7/26/2010	9:43:29 AM	Main Vac valve closed
7/26/2010	9:43:29 AM	Bubbler valve closed
7/26/2010	9:43:29 AM	Bypass valve opened
7/26/2010	9:43:29 AM	Helium MFC set to  0.000000
7/26/2010	9:43:29 AM	H2 MFC set to  0.000000
7/26/2010	9:43:29 AM	BCl3 MFC set to  0.000000
7/26/2010	9:43:29 AM	PHl3 MFC set to  0.000000
7/26/2010	9:43:29 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:43:29 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:43:29 AM	Tube furnace set to 0
7/26/2010	9:44:05 AM	Helium valve closed
7/26/2010	9:44:05 AM	H2 valve closed
7/26/2010	9:44:05 AM	BCl3 valve closed
7/26/2010	9:44:05 AM	PH3 valve closed
7/26/2010	9:44:05 AM	SiCl4 pre valve closed
7/26/2010	9:44:05 AM	SiCl4 post valve closed
7/26/2010	9:44:05 AM	Bubbler valve closed
7/26/2010	9:44:05 AM	Main Vac valve opened
7/26/2010	9:44:05 AM	Bypass valve opened
7/26/2010	9:44:05 AM	Helium MFC set to  0.000000
7/26/2010	9:44:05 AM	H2 MFC set to  0.000000
7/26/2010	9:44:05 AM	BCl3 MFC set to  0.000000
7/26/2010	9:44:05 AM	PHl3 MFC set to  0.000000
7/26/2010	9:44:05 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:44:05 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:44:05 AM	Tube furnace set to 0
7/26/2010	9:44:06 AM	Run finished at 9:44 AM
7/26/2010	9:44:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	9:44:20 AM	Recipe started at 9:44 AM
7/26/2010	9:44:20 AM	Helium valve closed
7/26/2010	9:44:20 AM	H2 valve closed
7/26/2010	9:44:20 AM	BCl3 valve closed
7/26/2010	9:44:20 AM	PH3 valve closed
7/26/2010	9:44:20 AM	SiCl4 pre valve closed
7/26/2010	9:44:20 AM	SiCl4 post valve closed
7/26/2010	9:44:20 AM	Main Vac valve closed
7/26/2010	9:44:20 AM	Bubbler valve closed
7/26/2010	9:44:20 AM	Bypass valve opened
7/26/2010	9:44:20 AM	Helium MFC set to  0.000000
7/26/2010	9:44:20 AM	H2 MFC set to  0.000000
7/26/2010	9:44:20 AM	BCl3 MFC set to  0.000000
7/26/2010	9:44:20 AM	PHl3 MFC set to  0.000000
7/26/2010	9:44:20 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:44:20 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:44:20 AM	Tube furnace set to 0
7/26/2010	9:44:21 AM	Helium valve closed
7/26/2010	9:44:21 AM	H2 valve closed
7/26/2010	9:44:21 AM	BCl3 valve closed
7/26/2010	9:44:21 AM	PH3 valve closed
7/26/2010	9:44:21 AM	SiCl4 pre valve closed
7/26/2010	9:44:21 AM	SiCl4 post valve closed
7/26/2010	9:44:21 AM	Bubbler valve closed
7/26/2010	9:44:21 AM	Main Vac valve opened
7/26/2010	9:44:21 AM	Bypass valve opened
7/26/2010	9:44:21 AM	Helium MFC set to  0.000000
7/26/2010	9:44:21 AM	H2 MFC set to  0.000000
7/26/2010	9:44:21 AM	BCl3 MFC set to  0.000000
7/26/2010	9:44:21 AM	PHl3 MFC set to  0.000000
7/26/2010	9:44:21 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:44:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:44:21 AM	Tube furnace set to 0
7/26/2010	9:45:21 AM	H2 valve closed
7/26/2010	9:45:21 AM	BCl3 valve closed
7/26/2010	9:45:21 AM	PH3 valve closed
7/26/2010	9:45:21 AM	SiCl4 pre valve closed
7/26/2010	9:45:21 AM	SiCl4 post valve closed
7/26/2010	9:45:21 AM	Bubbler valve closed
7/26/2010	9:45:21 AM	Helium valve opened
7/26/2010	9:45:21 AM	Main Vac valve opened
7/26/2010	9:45:21 AM	Bypass valve opened
7/26/2010	9:45:21 AM	Helium MFC set to  100.000000
7/26/2010	9:45:21 AM	H2 MFC set to  0.000000
7/26/2010	9:45:21 AM	BCl3 MFC set to  0.000000
7/26/2010	9:45:21 AM	PHl3 MFC set to  0.000000
7/26/2010	9:45:21 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:45:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:45:21 AM	Tube furnace set to 0
7/26/2010	9:54:21 AM	Helium valve closed
7/26/2010	9:54:21 AM	H2 valve closed
7/26/2010	9:54:21 AM	BCl3 valve closed
7/26/2010	9:54:21 AM	PH3 valve closed
7/26/2010	9:54:21 AM	SiCl4 pre valve closed
7/26/2010	9:54:21 AM	SiCl4 post valve closed
7/26/2010	9:54:21 AM	Bubbler valve closed
7/26/2010	9:54:21 AM	Main Vac valve opened
7/26/2010	9:54:21 AM	Bypass valve opened
7/26/2010	9:54:21 AM	Helium MFC set to  0.000000
7/26/2010	9:54:21 AM	H2 MFC set to  0.000000
7/26/2010	9:54:21 AM	BCl3 MFC set to  0.000000
7/26/2010	9:54:21 AM	PHl3 MFC set to  0.000000
7/26/2010	9:54:21 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:54:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:54:21 AM	Tube furnace set to 0
7/26/2010	9:55:21 AM	H2 valve closed
7/26/2010	9:55:21 AM	BCl3 valve closed
7/26/2010	9:55:21 AM	PH3 valve closed
7/26/2010	9:55:21 AM	SiCl4 pre valve closed
7/26/2010	9:55:21 AM	SiCl4 post valve closed
7/26/2010	9:55:21 AM	Bubbler valve closed
7/26/2010	9:55:21 AM	Helium valve opened
7/26/2010	9:55:21 AM	Main Vac valve opened
7/26/2010	9:55:21 AM	Bypass valve opened
7/26/2010	9:55:21 AM	Helium MFC set to  100.000000
7/26/2010	9:55:21 AM	H2 MFC set to  0.000000
7/26/2010	9:55:21 AM	BCl3 MFC set to  0.000000
7/26/2010	9:55:21 AM	PHl3 MFC set to  0.000000
7/26/2010	9:55:21 AM	SiCl4 MFC set to  0.000000
7/26/2010	9:55:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:55:21 AM	Tube furnace set to 0
7/26/2010	10:04:21 AM	Helium valve closed
7/26/2010	10:04:21 AM	H2 valve closed
7/26/2010	10:04:21 AM	BCl3 valve closed
7/26/2010	10:04:21 AM	PH3 valve closed
7/26/2010	10:04:21 AM	SiCl4 pre valve closed
7/26/2010	10:04:21 AM	SiCl4 post valve closed
7/26/2010	10:04:21 AM	Bubbler valve closed
7/26/2010	10:04:21 AM	Main Vac valve opened
7/26/2010	10:04:21 AM	Bypass valve opened
7/26/2010	10:04:21 AM	Helium MFC set to  0.000000
7/26/2010	10:04:21 AM	H2 MFC set to  0.000000
7/26/2010	10:04:21 AM	BCl3 MFC set to  0.000000
7/26/2010	10:04:21 AM	PHl3 MFC set to  0.000000
7/26/2010	10:04:21 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:04:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:04:22 AM	Tube furnace set to 0
7/26/2010	10:05:22 AM	H2 valve closed
7/26/2010	10:05:22 AM	BCl3 valve closed
7/26/2010	10:05:22 AM	PH3 valve closed
7/26/2010	10:05:22 AM	SiCl4 pre valve closed
7/26/2010	10:05:22 AM	SiCl4 post valve closed
7/26/2010	10:05:22 AM	Bubbler valve closed
7/26/2010	10:05:22 AM	Helium valve opened
7/26/2010	10:05:22 AM	Main Vac valve opened
7/26/2010	10:05:22 AM	Bypass valve opened
7/26/2010	10:05:22 AM	Helium MFC set to  100.000000
7/26/2010	10:05:22 AM	H2 MFC set to  0.000000
7/26/2010	10:05:22 AM	BCl3 MFC set to  0.000000
7/26/2010	10:05:22 AM	PHl3 MFC set to  0.000000
7/26/2010	10:05:22 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:05:22 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:05:22 AM	Tube furnace set to 0
7/26/2010	10:14:22 AM	Helium valve closed
7/26/2010	10:14:22 AM	H2 valve closed
7/26/2010	10:14:22 AM	BCl3 valve closed
7/26/2010	10:14:22 AM	PH3 valve closed
7/26/2010	10:14:22 AM	SiCl4 pre valve closed
7/26/2010	10:14:22 AM	SiCl4 post valve closed
7/26/2010	10:14:22 AM	Bubbler valve closed
7/26/2010	10:14:22 AM	Main Vac valve opened
7/26/2010	10:14:22 AM	Bypass valve opened
7/26/2010	10:14:22 AM	Helium MFC set to  0.000000
7/26/2010	10:14:22 AM	H2 MFC set to  0.000000
7/26/2010	10:14:22 AM	BCl3 MFC set to  0.000000
7/26/2010	10:14:22 AM	PHl3 MFC set to  0.000000
7/26/2010	10:14:22 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:14:22 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:14:22 AM	Tube furnace set to 0
7/26/2010	10:15:22 AM	H2 valve closed
7/26/2010	10:15:22 AM	BCl3 valve closed
7/26/2010	10:15:22 AM	PH3 valve closed
7/26/2010	10:15:22 AM	SiCl4 pre valve closed
7/26/2010	10:15:22 AM	SiCl4 post valve closed
7/26/2010	10:15:22 AM	Bubbler valve closed
7/26/2010	10:15:22 AM	Helium valve opened
7/26/2010	10:15:22 AM	Main Vac valve opened
7/26/2010	10:15:22 AM	Bypass valve opened
7/26/2010	10:15:22 AM	Helium MFC set to  100.000000
7/26/2010	10:15:22 AM	H2 MFC set to  0.000000
7/26/2010	10:15:22 AM	BCl3 MFC set to  0.000000
7/26/2010	10:15:22 AM	PHl3 MFC set to  0.000000
7/26/2010	10:15:22 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:15:22 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:15:22 AM	Tube furnace set to 0
7/26/2010	10:24:22 AM	Helium valve closed
7/26/2010	10:24:22 AM	H2 valve closed
7/26/2010	10:24:22 AM	BCl3 valve closed
7/26/2010	10:24:22 AM	PH3 valve closed
7/26/2010	10:24:22 AM	SiCl4 pre valve closed
7/26/2010	10:24:22 AM	SiCl4 post valve closed
7/26/2010	10:24:22 AM	Bubbler valve closed
7/26/2010	10:24:22 AM	Main Vac valve opened
7/26/2010	10:24:22 AM	Bypass valve opened
7/26/2010	10:24:22 AM	Helium MFC set to  0.000000
7/26/2010	10:24:22 AM	H2 MFC set to  0.000000
7/26/2010	10:24:22 AM	BCl3 MFC set to  0.000000
7/26/2010	10:24:22 AM	PHl3 MFC set to  0.000000
7/26/2010	10:24:22 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:24:22 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:24:22 AM	Tube furnace set to 0
7/26/2010	10:25:22 AM	H2 valve closed
7/26/2010	10:25:22 AM	BCl3 valve closed
7/26/2010	10:25:22 AM	PH3 valve closed
7/26/2010	10:25:22 AM	SiCl4 pre valve closed
7/26/2010	10:25:22 AM	SiCl4 post valve closed
7/26/2010	10:25:22 AM	Bubbler valve closed
7/26/2010	10:25:22 AM	Helium valve opened
7/26/2010	10:25:22 AM	Main Vac valve opened
7/26/2010	10:25:22 AM	Bypass valve opened
7/26/2010	10:25:22 AM	Helium MFC set to  100.000000
7/26/2010	10:25:22 AM	H2 MFC set to  0.000000
7/26/2010	10:25:22 AM	BCl3 MFC set to  0.000000
7/26/2010	10:25:22 AM	PHl3 MFC set to  0.000000
7/26/2010	10:25:22 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:25:22 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:25:23 AM	Tube furnace set to 0
7/26/2010	10:34:23 AM	Helium valve closed
7/26/2010	10:34:23 AM	H2 valve closed
7/26/2010	10:34:23 AM	BCl3 valve closed
7/26/2010	10:34:23 AM	PH3 valve closed
7/26/2010	10:34:23 AM	SiCl4 pre valve closed
7/26/2010	10:34:23 AM	SiCl4 post valve closed
7/26/2010	10:34:23 AM	Bubbler valve closed
7/26/2010	10:34:23 AM	Main Vac valve opened
7/26/2010	10:34:23 AM	Bypass valve opened
7/26/2010	10:34:23 AM	Helium MFC set to  0.000000
7/26/2010	10:34:23 AM	H2 MFC set to  0.000000
7/26/2010	10:34:23 AM	BCl3 MFC set to  0.000000
7/26/2010	10:34:23 AM	PHl3 MFC set to  0.000000
7/26/2010	10:34:23 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:34:23 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:34:23 AM	Tube furnace set to 0
7/26/2010	10:34:24 AM	Run finished at 10:34 AM
7/26/2010	10:42:11 AM	Recipe started at 10:42 AM
7/26/2010	10:42:11 AM	Helium valve closed
7/26/2010	10:42:11 AM	BCl3 valve closed
7/26/2010	10:42:11 AM	PH3 valve closed
7/26/2010	10:42:11 AM	SiCl4 pre valve closed
7/26/2010	10:42:11 AM	SiCl4 post valve closed
7/26/2010	10:42:11 AM	Main Vac valve closed
7/26/2010	10:42:11 AM	Bypass valve closed
7/26/2010	10:42:11 AM	Bubbler valve closed
7/26/2010	10:42:11 AM	H2 valve opened
7/26/2010	10:42:11 AM	Helium MFC set to  0.000000
7/26/2010	10:42:11 AM	H2 MFC set to  500.000000
7/26/2010	10:42:11 AM	BCl3 MFC set to  0.000000
7/26/2010	10:42:11 AM	PHl3 MFC set to  0.000000
7/26/2010	10:42:11 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:42:11 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:42:11 AM	Tube furnace set to 0
7/26/2010	10:43:30 AM	Helium valve closed
7/26/2010	10:43:30 AM	BCl3 valve closed
7/26/2010	10:43:30 AM	PH3 valve closed
7/26/2010	10:43:30 AM	SiCl4 pre valve closed
7/26/2010	10:43:30 AM	SiCl4 post valve closed
7/26/2010	10:43:30 AM	Main Vac valve closed
7/26/2010	10:43:30 AM	Bypass valve closed
7/26/2010	10:43:30 AM	H2 valve opened
7/26/2010	10:43:30 AM	Bubbler valve opened
7/26/2010	10:43:30 AM	Helium MFC set to  0.000000
7/26/2010	10:43:30 AM	H2 MFC set to  250.000000
7/26/2010	10:43:30 AM	BCl3 MFC set to  0.000000
7/26/2010	10:43:30 AM	PHl3 MFC set to  0.000000
7/26/2010	10:43:30 AM	SiCl4 MFC set to  0.000000
7/26/2010	10:43:30 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:43:30 AM	Tube furnace set to 1000
7/26/2010	11:03:30 AM	Helium valve closed
7/26/2010	11:03:30 AM	PH3 valve closed
7/26/2010	11:03:30 AM	Main Vac valve closed
7/26/2010	11:03:30 AM	Bypass valve closed
7/26/2010	11:03:30 AM	H2 valve opened
7/26/2010	11:03:30 AM	BCl3 valve opened
7/26/2010	11:03:30 AM	SiCl4 pre valve opened
7/26/2010	11:03:30 AM	SiCl4 post valve opened
7/26/2010	11:03:30 AM	Bubbler valve opened
7/26/2010	11:03:30 AM	Helium MFC set to  0.000000
7/26/2010	11:03:30 AM	H2 MFC set to  250.000000
7/26/2010	11:03:30 AM	BCl3 MFC set to  6.000000
7/26/2010	11:03:30 AM	PHl3 MFC set to  0.000000
7/26/2010	11:03:30 AM	SiCl4 MFC set to  50.000000
7/26/2010	11:03:30 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:03:30 AM	Tube furnace set to 1000
7/26/2010	11:18:30 AM	H2 valve closed
7/26/2010	11:18:30 AM	BCl3 valve closed
7/26/2010	11:18:30 AM	PH3 valve closed
7/26/2010	11:18:30 AM	SiCl4 pre valve closed
7/26/2010	11:18:30 AM	SiCl4 post valve closed
7/26/2010	11:18:30 AM	Main Vac valve closed
7/26/2010	11:18:30 AM	Bypass valve closed
7/26/2010	11:18:30 AM	Helium valve opened
7/26/2010	11:18:30 AM	Bubbler valve opened
7/26/2010	11:18:30 AM	Helium MFC set to  500.000000
7/26/2010	11:18:30 AM	H2 MFC set to  0.000000
7/26/2010	11:18:30 AM	BCl3 MFC set to  0.000000
7/26/2010	11:18:30 AM	PHl3 MFC set to  0.000000
7/26/2010	11:18:30 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:18:30 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:18:31 AM	Tube furnace set to 0
7/26/2010	11:38:31 AM	Helium valve closed
7/26/2010	11:38:31 AM	H2 valve closed
7/26/2010	11:38:31 AM	BCl3 valve closed
7/26/2010	11:38:31 AM	PH3 valve closed
7/26/2010	11:38:31 AM	SiCl4 pre valve closed
7/26/2010	11:38:31 AM	SiCl4 post valve closed
7/26/2010	11:38:31 AM	Main Vac valve closed
7/26/2010	11:38:31 AM	Bypass valve closed
7/26/2010	11:38:31 AM	Bubbler valve closed
7/26/2010	11:38:31 AM	Helium MFC set to  0.000000
7/26/2010	11:38:31 AM	H2 MFC set to  0.000000
7/26/2010	11:38:31 AM	BCl3 MFC set to  0.000000
7/26/2010	11:38:31 AM	PHl3 MFC set to  0.000000
7/26/2010	11:38:31 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:38:31 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:38:31 AM	Tube furnace set to 0
7/26/2010	11:38:31 AM	Run finished at 11:38 AM
7/26/2010	11:43:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	11:43:41 AM	Recipe started at 11:43 AM
7/26/2010	11:43:41 AM	H2 valve closed
7/26/2010	11:43:41 AM	BCl3 valve closed
7/26/2010	11:43:41 AM	PH3 valve closed
7/26/2010	11:43:41 AM	SiCl4 pre valve closed
7/26/2010	11:43:41 AM	SiCl4 post valve closed
7/26/2010	11:43:41 AM	Main Vac valve closed
7/26/2010	11:43:41 AM	Bypass valve closed
7/26/2010	11:43:41 AM	Bubbler valve closed
7/26/2010	11:43:41 AM	Helium valve opened
7/26/2010	11:43:41 AM	Helium MFC set to  500.000000
7/26/2010	11:43:41 AM	H2 MFC set to  0.000000
7/26/2010	11:43:41 AM	BCl3 MFC set to  0.000000
7/26/2010	11:43:41 AM	PHl3 MFC set to  0.000000
7/26/2010	11:43:41 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:43:41 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:43:41 AM	Tube furnace set to 0
7/26/2010	11:43:43 AM	Helium valve closed
7/26/2010	11:43:43 AM	H2 valve closed
7/26/2010	11:43:43 AM	BCl3 valve closed
7/26/2010	11:43:43 AM	PH3 valve closed
7/26/2010	11:43:43 AM	SiCl4 pre valve closed
7/26/2010	11:43:43 AM	SiCl4 post valve closed
7/26/2010	11:43:43 AM	Main Vac valve closed
7/26/2010	11:43:43 AM	Bypass valve closed
7/26/2010	11:43:43 AM	Bubbler valve closed
7/26/2010	11:43:43 AM	Helium MFC set to  0.000000
7/26/2010	11:43:43 AM	H2 MFC set to  0.000000
7/26/2010	11:43:43 AM	BCl3 MFC set to  0.000000
7/26/2010	11:43:43 AM	PHl3 MFC set to  0.000000
7/26/2010	11:43:43 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:43:43 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:43:43 AM	Tube furnace set to 0
7/26/2010	11:43:43 AM	Run finished at 11:43 AM
7/26/2010	11:43:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	11:58:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	11:58:59 AM	Recipe started at 11:58 AM
7/26/2010	11:58:59 AM	Helium valve closed
7/26/2010	11:58:59 AM	H2 valve closed
7/26/2010	11:58:59 AM	BCl3 valve closed
7/26/2010	11:58:59 AM	PH3 valve closed
7/26/2010	11:58:59 AM	SiCl4 pre valve closed
7/26/2010	11:58:59 AM	SiCl4 post valve closed
7/26/2010	11:58:59 AM	Main Vac valve closed
7/26/2010	11:58:59 AM	Bubbler valve closed
7/26/2010	11:58:59 AM	Bypass valve opened
7/26/2010	11:58:59 AM	Helium MFC set to  0.000000
7/26/2010	11:58:59 AM	H2 MFC set to  0.000000
7/26/2010	11:58:59 AM	BCl3 MFC set to  0.000000
7/26/2010	11:58:59 AM	PHl3 MFC set to  0.000000
7/26/2010	11:58:59 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:58:59 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:58:59 AM	Tube furnace set to 0
7/26/2010	11:59:35 AM	Helium valve closed
7/26/2010	11:59:35 AM	H2 valve closed
7/26/2010	11:59:35 AM	BCl3 valve closed
7/26/2010	11:59:35 AM	PH3 valve closed
7/26/2010	11:59:35 AM	SiCl4 pre valve closed
7/26/2010	11:59:35 AM	SiCl4 post valve closed
7/26/2010	11:59:35 AM	Bubbler valve closed
7/26/2010	11:59:35 AM	Main Vac valve opened
7/26/2010	11:59:35 AM	Bypass valve opened
7/26/2010	11:59:35 AM	Helium MFC set to  0.000000
7/26/2010	11:59:35 AM	H2 MFC set to  0.000000
7/26/2010	11:59:35 AM	BCl3 MFC set to  0.000000
7/26/2010	11:59:35 AM	PHl3 MFC set to  0.000000
7/26/2010	11:59:35 AM	SiCl4 MFC set to  0.000000
7/26/2010	11:59:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:59:36 AM	Tube furnace set to 0
7/26/2010	11:59:36 AM	Run finished at 11:59 AM
7/26/2010	11:59:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	12:00:16 PM	Recipe started at 12:00 PM
7/26/2010	12:00:16 PM	Helium valve closed
7/26/2010	12:00:16 PM	H2 valve closed
7/26/2010	12:00:16 PM	BCl3 valve closed
7/26/2010	12:00:16 PM	PH3 valve closed
7/26/2010	12:00:16 PM	SiCl4 pre valve closed
7/26/2010	12:00:16 PM	SiCl4 post valve closed
7/26/2010	12:00:16 PM	Main Vac valve closed
7/26/2010	12:00:16 PM	Bubbler valve closed
7/26/2010	12:00:16 PM	Bypass valve opened
7/26/2010	12:00:16 PM	Helium MFC set to  0.000000
7/26/2010	12:00:16 PM	H2 MFC set to  0.000000
7/26/2010	12:00:16 PM	BCl3 MFC set to  0.000000
7/26/2010	12:00:16 PM	PHl3 MFC set to  0.000000
7/26/2010	12:00:16 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:00:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:00:16 PM	Tube furnace set to 0
7/26/2010	12:00:16 PM	Helium valve closed
7/26/2010	12:00:16 PM	H2 valve closed
7/26/2010	12:00:16 PM	BCl3 valve closed
7/26/2010	12:00:16 PM	PH3 valve closed
7/26/2010	12:00:16 PM	SiCl4 pre valve closed
7/26/2010	12:00:16 PM	SiCl4 post valve closed
7/26/2010	12:00:16 PM	Bubbler valve closed
7/26/2010	12:00:16 PM	Main Vac valve opened
7/26/2010	12:00:16 PM	Bypass valve opened
7/26/2010	12:00:16 PM	Helium MFC set to  0.000000
7/26/2010	12:00:16 PM	H2 MFC set to  0.000000
7/26/2010	12:00:16 PM	BCl3 MFC set to  0.000000
7/26/2010	12:00:16 PM	PHl3 MFC set to  0.000000
7/26/2010	12:00:16 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:00:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:00:17 PM	Tube furnace set to 0
7/26/2010	12:01:17 PM	H2 valve closed
7/26/2010	12:01:17 PM	BCl3 valve closed
7/26/2010	12:01:17 PM	PH3 valve closed
7/26/2010	12:01:17 PM	SiCl4 pre valve closed
7/26/2010	12:01:17 PM	SiCl4 post valve closed
7/26/2010	12:01:17 PM	Bubbler valve closed
7/26/2010	12:01:17 PM	Helium valve opened
7/26/2010	12:01:17 PM	Main Vac valve opened
7/26/2010	12:01:17 PM	Bypass valve opened
7/26/2010	12:01:17 PM	Helium MFC set to  100.000000
7/26/2010	12:01:17 PM	H2 MFC set to  0.000000
7/26/2010	12:01:17 PM	BCl3 MFC set to  0.000000
7/26/2010	12:01:17 PM	PHl3 MFC set to  0.000000
7/26/2010	12:01:17 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:01:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:01:17 PM	Tube furnace set to 0
7/26/2010	12:10:17 PM	Helium valve closed
7/26/2010	12:10:17 PM	H2 valve closed
7/26/2010	12:10:17 PM	BCl3 valve closed
7/26/2010	12:10:17 PM	PH3 valve closed
7/26/2010	12:10:17 PM	SiCl4 pre valve closed
7/26/2010	12:10:17 PM	SiCl4 post valve closed
7/26/2010	12:10:17 PM	Bubbler valve closed
7/26/2010	12:10:17 PM	Main Vac valve opened
7/26/2010	12:10:17 PM	Bypass valve opened
7/26/2010	12:10:17 PM	Helium MFC set to  0.000000
7/26/2010	12:10:17 PM	H2 MFC set to  0.000000
7/26/2010	12:10:17 PM	BCl3 MFC set to  0.000000
7/26/2010	12:10:17 PM	PHl3 MFC set to  0.000000
7/26/2010	12:10:17 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:10:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:10:17 PM	Tube furnace set to 0
7/26/2010	12:11:17 PM	H2 valve closed
7/26/2010	12:11:17 PM	BCl3 valve closed
7/26/2010	12:11:17 PM	PH3 valve closed
7/26/2010	12:11:17 PM	SiCl4 pre valve closed
7/26/2010	12:11:17 PM	SiCl4 post valve closed
7/26/2010	12:11:17 PM	Bubbler valve closed
7/26/2010	12:11:17 PM	Helium valve opened
7/26/2010	12:11:17 PM	Main Vac valve opened
7/26/2010	12:11:17 PM	Bypass valve opened
7/26/2010	12:11:17 PM	Helium MFC set to  100.000000
7/26/2010	12:11:17 PM	H2 MFC set to  0.000000
7/26/2010	12:11:17 PM	BCl3 MFC set to  0.000000
7/26/2010	12:11:17 PM	PHl3 MFC set to  0.000000
7/26/2010	12:11:17 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:11:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:11:17 PM	Tube furnace set to 0
7/26/2010	12:20:17 PM	Helium valve closed
7/26/2010	12:20:17 PM	H2 valve closed
7/26/2010	12:20:17 PM	BCl3 valve closed
7/26/2010	12:20:17 PM	PH3 valve closed
7/26/2010	12:20:17 PM	SiCl4 pre valve closed
7/26/2010	12:20:17 PM	SiCl4 post valve closed
7/26/2010	12:20:17 PM	Bubbler valve closed
7/26/2010	12:20:17 PM	Main Vac valve opened
7/26/2010	12:20:17 PM	Bypass valve opened
7/26/2010	12:20:17 PM	Helium MFC set to  0.000000
7/26/2010	12:20:17 PM	H2 MFC set to  0.000000
7/26/2010	12:20:17 PM	BCl3 MFC set to  0.000000
7/26/2010	12:20:17 PM	PHl3 MFC set to  0.000000
7/26/2010	12:20:17 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:20:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:20:17 PM	Tube furnace set to 0
7/26/2010	12:21:17 PM	H2 valve closed
7/26/2010	12:21:17 PM	BCl3 valve closed
7/26/2010	12:21:17 PM	PH3 valve closed
7/26/2010	12:21:17 PM	SiCl4 pre valve closed
7/26/2010	12:21:17 PM	SiCl4 post valve closed
7/26/2010	12:21:17 PM	Bubbler valve closed
7/26/2010	12:21:17 PM	Helium valve opened
7/26/2010	12:21:17 PM	Main Vac valve opened
7/26/2010	12:21:17 PM	Bypass valve opened
7/26/2010	12:21:17 PM	Helium MFC set to  100.000000
7/26/2010	12:21:17 PM	H2 MFC set to  0.000000
7/26/2010	12:21:17 PM	BCl3 MFC set to  0.000000
7/26/2010	12:21:17 PM	PHl3 MFC set to  0.000000
7/26/2010	12:21:17 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:21:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:21:18 PM	Tube furnace set to 0
7/26/2010	12:30:18 PM	Helium valve closed
7/26/2010	12:30:18 PM	H2 valve closed
7/26/2010	12:30:18 PM	BCl3 valve closed
7/26/2010	12:30:18 PM	PH3 valve closed
7/26/2010	12:30:18 PM	SiCl4 pre valve closed
7/26/2010	12:30:18 PM	SiCl4 post valve closed
7/26/2010	12:30:18 PM	Bubbler valve closed
7/26/2010	12:30:18 PM	Main Vac valve opened
7/26/2010	12:30:18 PM	Bypass valve opened
7/26/2010	12:30:18 PM	Helium MFC set to  0.000000
7/26/2010	12:30:18 PM	H2 MFC set to  0.000000
7/26/2010	12:30:18 PM	BCl3 MFC set to  0.000000
7/26/2010	12:30:18 PM	PHl3 MFC set to  0.000000
7/26/2010	12:30:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:30:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:30:18 PM	Tube furnace set to 0
7/26/2010	12:31:18 PM	H2 valve closed
7/26/2010	12:31:18 PM	BCl3 valve closed
7/26/2010	12:31:18 PM	PH3 valve closed
7/26/2010	12:31:18 PM	SiCl4 pre valve closed
7/26/2010	12:31:18 PM	SiCl4 post valve closed
7/26/2010	12:31:18 PM	Bubbler valve closed
7/26/2010	12:31:18 PM	Helium valve opened
7/26/2010	12:31:18 PM	Main Vac valve opened
7/26/2010	12:31:18 PM	Bypass valve opened
7/26/2010	12:31:18 PM	Helium MFC set to  100.000000
7/26/2010	12:31:18 PM	H2 MFC set to  0.000000
7/26/2010	12:31:18 PM	BCl3 MFC set to  0.000000
7/26/2010	12:31:18 PM	PHl3 MFC set to  0.000000
7/26/2010	12:31:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:31:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:31:18 PM	Tube furnace set to 0
7/26/2010	12:40:18 PM	Helium valve closed
7/26/2010	12:40:18 PM	H2 valve closed
7/26/2010	12:40:18 PM	BCl3 valve closed
7/26/2010	12:40:18 PM	PH3 valve closed
7/26/2010	12:40:18 PM	SiCl4 pre valve closed
7/26/2010	12:40:18 PM	SiCl4 post valve closed
7/26/2010	12:40:18 PM	Bubbler valve closed
7/26/2010	12:40:18 PM	Main Vac valve opened
7/26/2010	12:40:18 PM	Bypass valve opened
7/26/2010	12:40:18 PM	Helium MFC set to  0.000000
7/26/2010	12:40:18 PM	H2 MFC set to  0.000000
7/26/2010	12:40:18 PM	BCl3 MFC set to  0.000000
7/26/2010	12:40:18 PM	PHl3 MFC set to  0.000000
7/26/2010	12:40:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:40:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:40:18 PM	Tube furnace set to 0
7/26/2010	12:41:18 PM	H2 valve closed
7/26/2010	12:41:18 PM	BCl3 valve closed
7/26/2010	12:41:18 PM	PH3 valve closed
7/26/2010	12:41:18 PM	SiCl4 pre valve closed
7/26/2010	12:41:18 PM	SiCl4 post valve closed
7/26/2010	12:41:18 PM	Bubbler valve closed
7/26/2010	12:41:18 PM	Helium valve opened
7/26/2010	12:41:18 PM	Main Vac valve opened
7/26/2010	12:41:18 PM	Bypass valve opened
7/26/2010	12:41:18 PM	Helium MFC set to  100.000000
7/26/2010	12:41:18 PM	H2 MFC set to  0.000000
7/26/2010	12:41:18 PM	BCl3 MFC set to  0.000000
7/26/2010	12:41:18 PM	PHl3 MFC set to  0.000000
7/26/2010	12:41:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:41:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:41:18 PM	Tube furnace set to 0
7/26/2010	12:50:18 PM	Helium valve closed
7/26/2010	12:50:18 PM	H2 valve closed
7/26/2010	12:50:18 PM	BCl3 valve closed
7/26/2010	12:50:18 PM	PH3 valve closed
7/26/2010	12:50:18 PM	SiCl4 pre valve closed
7/26/2010	12:50:18 PM	SiCl4 post valve closed
7/26/2010	12:50:18 PM	Bubbler valve closed
7/26/2010	12:50:18 PM	Main Vac valve opened
7/26/2010	12:50:18 PM	Bypass valve opened
7/26/2010	12:50:18 PM	Helium MFC set to  0.000000
7/26/2010	12:50:18 PM	H2 MFC set to  0.000000
7/26/2010	12:50:18 PM	BCl3 MFC set to  0.000000
7/26/2010	12:50:18 PM	PHl3 MFC set to  0.000000
7/26/2010	12:50:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	12:50:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	12:50:18 PM	Tube furnace set to 0
7/26/2010	12:50:19 PM	Run finished at 12:50 PM
7/26/2010	2:03:52 PM	Recipe started at 2:03 PM
7/26/2010	2:03:52 PM	Helium valve closed
7/26/2010	2:03:52 PM	BCl3 valve closed
7/26/2010	2:03:52 PM	PH3 valve closed
7/26/2010	2:03:52 PM	SiCl4 pre valve closed
7/26/2010	2:03:52 PM	SiCl4 post valve closed
7/26/2010	2:03:52 PM	Main Vac valve closed
7/26/2010	2:03:52 PM	Bypass valve closed
7/26/2010	2:03:52 PM	Bubbler valve closed
7/26/2010	2:03:52 PM	H2 valve opened
7/26/2010	2:03:52 PM	Helium MFC set to  0.000000
7/26/2010	2:03:52 PM	H2 MFC set to  500.000000
7/26/2010	2:03:52 PM	BCl3 MFC set to  0.000000
7/26/2010	2:03:52 PM	PHl3 MFC set to  0.000000
7/26/2010	2:03:52 PM	SiCl4 MFC set to  0.000000
7/26/2010	2:03:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	2:03:52 PM	Tube furnace set to 0
7/26/2010	2:05:12 PM	Helium valve closed
7/26/2010	2:05:12 PM	BCl3 valve closed
7/26/2010	2:05:12 PM	PH3 valve closed
7/26/2010	2:05:12 PM	SiCl4 pre valve closed
7/26/2010	2:05:12 PM	SiCl4 post valve closed
7/26/2010	2:05:12 PM	Main Vac valve closed
7/26/2010	2:05:12 PM	Bypass valve closed
7/26/2010	2:05:12 PM	H2 valve opened
7/26/2010	2:05:12 PM	Bubbler valve opened
7/26/2010	2:05:12 PM	Helium MFC set to  0.000000
7/26/2010	2:05:12 PM	H2 MFC set to  250.000000
7/26/2010	2:05:12 PM	BCl3 MFC set to  0.000000
7/26/2010	2:05:12 PM	PHl3 MFC set to  0.000000
7/26/2010	2:05:12 PM	SiCl4 MFC set to  0.000000
7/26/2010	2:05:12 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	2:05:12 PM	Tube furnace set to 1000
7/26/2010	2:25:12 PM	Helium valve closed
7/26/2010	2:25:12 PM	PH3 valve closed
7/26/2010	2:25:12 PM	Main Vac valve closed
7/26/2010	2:25:12 PM	Bypass valve closed
7/26/2010	2:25:12 PM	H2 valve opened
7/26/2010	2:25:12 PM	BCl3 valve opened
7/26/2010	2:25:12 PM	SiCl4 pre valve opened
7/26/2010	2:25:12 PM	SiCl4 post valve opened
7/26/2010	2:25:12 PM	Bubbler valve opened
7/26/2010	2:25:12 PM	Helium MFC set to  0.000000
7/26/2010	2:25:12 PM	H2 MFC set to  250.000000
7/26/2010	2:25:12 PM	BCl3 MFC set to  6.000000
7/26/2010	2:25:12 PM	PHl3 MFC set to  0.000000
7/26/2010	2:25:12 PM	SiCl4 MFC set to  50.000000
7/26/2010	2:25:12 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	2:25:13 PM	Tube furnace set to 1000
7/26/2010	2:35:13 PM	H2 valve closed
7/26/2010	2:35:13 PM	BCl3 valve closed
7/26/2010	2:35:13 PM	PH3 valve closed
7/26/2010	2:35:13 PM	SiCl4 pre valve closed
7/26/2010	2:35:13 PM	SiCl4 post valve closed
7/26/2010	2:35:13 PM	Main Vac valve closed
7/26/2010	2:35:13 PM	Bypass valve closed
7/26/2010	2:35:13 PM	Helium valve opened
7/26/2010	2:35:13 PM	Bubbler valve opened
7/26/2010	2:35:13 PM	Helium MFC set to  500.000000
7/26/2010	2:35:13 PM	H2 MFC set to  0.000000
7/26/2010	2:35:13 PM	BCl3 MFC set to  0.000000
7/26/2010	2:35:13 PM	PHl3 MFC set to  0.000000
7/26/2010	2:35:13 PM	SiCl4 MFC set to  0.000000
7/26/2010	2:35:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	2:35:13 PM	Tube furnace set to 0
7/26/2010	2:55:13 PM	Helium valve closed
7/26/2010	2:55:13 PM	H2 valve closed
7/26/2010	2:55:13 PM	BCl3 valve closed
7/26/2010	2:55:13 PM	PH3 valve closed
7/26/2010	2:55:13 PM	SiCl4 pre valve closed
7/26/2010	2:55:13 PM	SiCl4 post valve closed
7/26/2010	2:55:13 PM	Main Vac valve closed
7/26/2010	2:55:13 PM	Bypass valve closed
7/26/2010	2:55:13 PM	Bubbler valve closed
7/26/2010	2:55:13 PM	Helium MFC set to  0.000000
7/26/2010	2:55:13 PM	H2 MFC set to  0.000000
7/26/2010	2:55:13 PM	BCl3 MFC set to  0.000000
7/26/2010	2:55:13 PM	PHl3 MFC set to  0.000000
7/26/2010	2:55:13 PM	SiCl4 MFC set to  0.000000
7/26/2010	2:55:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	2:55:13 PM	Tube furnace set to 0
7/26/2010	2:55:13 PM	Run finished at 2:55 PM
7/26/2010	3:05:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	3:05:42 PM	Recipe started at 3:05 PM
7/26/2010	3:05:42 PM	H2 valve closed
7/26/2010	3:05:42 PM	BCl3 valve closed
7/26/2010	3:05:42 PM	PH3 valve closed
7/26/2010	3:05:42 PM	SiCl4 pre valve closed
7/26/2010	3:05:42 PM	SiCl4 post valve closed
7/26/2010	3:05:42 PM	Main Vac valve closed
7/26/2010	3:05:42 PM	Bypass valve closed
7/26/2010	3:05:42 PM	Bubbler valve closed
7/26/2010	3:05:42 PM	Helium valve opened
7/26/2010	3:05:42 PM	Helium MFC set to  500.000000
7/26/2010	3:05:42 PM	H2 MFC set to  0.000000
7/26/2010	3:05:42 PM	BCl3 MFC set to  0.000000
7/26/2010	3:05:42 PM	PHl3 MFC set to  0.000000
7/26/2010	3:05:42 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:05:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:05:42 PM	Tube furnace set to 0
7/26/2010	3:05:47 PM	Helium valve closed
7/26/2010	3:05:47 PM	H2 valve closed
7/26/2010	3:05:47 PM	BCl3 valve closed
7/26/2010	3:05:47 PM	PH3 valve closed
7/26/2010	3:05:47 PM	SiCl4 pre valve closed
7/26/2010	3:05:47 PM	SiCl4 post valve closed
7/26/2010	3:05:47 PM	Main Vac valve closed
7/26/2010	3:05:47 PM	Bypass valve closed
7/26/2010	3:05:47 PM	Bubbler valve closed
7/26/2010	3:05:47 PM	Helium MFC set to  0.000000
7/26/2010	3:05:47 PM	H2 MFC set to  0.000000
7/26/2010	3:05:47 PM	BCl3 MFC set to  0.000000
7/26/2010	3:05:47 PM	PHl3 MFC set to  0.000000
7/26/2010	3:05:47 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:05:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:05:47 PM	Tube furnace set to 0
7/26/2010	3:05:47 PM	Run finished at 3:05 PM
7/26/2010	3:05:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2010	3:07:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	3:07:04 PM	Recipe started at 3:07 PM
7/26/2010	3:07:04 PM	Helium valve closed
7/26/2010	3:07:04 PM	H2 valve closed
7/26/2010	3:07:04 PM	BCl3 valve closed
7/26/2010	3:07:04 PM	PH3 valve closed
7/26/2010	3:07:04 PM	SiCl4 pre valve closed
7/26/2010	3:07:04 PM	SiCl4 post valve closed
7/26/2010	3:07:04 PM	Main Vac valve closed
7/26/2010	3:07:04 PM	Bubbler valve closed
7/26/2010	3:07:04 PM	Bypass valve opened
7/26/2010	3:07:04 PM	Helium MFC set to  0.000000
7/26/2010	3:07:04 PM	H2 MFC set to  0.000000
7/26/2010	3:07:04 PM	BCl3 MFC set to  0.000000
7/26/2010	3:07:04 PM	PHl3 MFC set to  0.000000
7/26/2010	3:07:04 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:07:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:07:05 PM	Tube furnace set to 0
7/26/2010	3:07:37 PM	Helium valve closed
7/26/2010	3:07:37 PM	H2 valve closed
7/26/2010	3:07:37 PM	BCl3 valve closed
7/26/2010	3:07:37 PM	PH3 valve closed
7/26/2010	3:07:37 PM	SiCl4 pre valve closed
7/26/2010	3:07:37 PM	SiCl4 post valve closed
7/26/2010	3:07:37 PM	Bubbler valve closed
7/26/2010	3:07:37 PM	Main Vac valve opened
7/26/2010	3:07:37 PM	Bypass valve opened
7/26/2010	3:07:37 PM	Helium MFC set to  0.000000
7/26/2010	3:07:37 PM	H2 MFC set to  0.000000
7/26/2010	3:07:37 PM	BCl3 MFC set to  0.000000
7/26/2010	3:07:37 PM	PHl3 MFC set to  0.000000
7/26/2010	3:07:37 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:07:37 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:07:37 PM	Tube furnace set to 0
7/26/2010	3:07:37 PM	Run finished at 3:07 PM
7/26/2010	3:07:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	3:11:39 PM	Recipe started at 3:11 PM
7/26/2010	3:11:39 PM	Helium valve closed
7/26/2010	3:11:39 PM	H2 valve closed
7/26/2010	3:11:39 PM	BCl3 valve closed
7/26/2010	3:11:39 PM	PH3 valve closed
7/26/2010	3:11:39 PM	SiCl4 pre valve closed
7/26/2010	3:11:39 PM	SiCl4 post valve closed
7/26/2010	3:11:39 PM	Main Vac valve closed
7/26/2010	3:11:39 PM	Bubbler valve closed
7/26/2010	3:11:39 PM	Bypass valve opened
7/26/2010	3:11:39 PM	Helium MFC set to  0.000000
7/26/2010	3:11:39 PM	H2 MFC set to  0.000000
7/26/2010	3:11:39 PM	BCl3 MFC set to  0.000000
7/26/2010	3:11:39 PM	PHl3 MFC set to  0.000000
7/26/2010	3:11:39 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:11:39 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:11:39 PM	Tube furnace set to 0
7/26/2010	3:11:39 PM	Helium valve closed
7/26/2010	3:11:39 PM	H2 valve closed
7/26/2010	3:11:39 PM	BCl3 valve closed
7/26/2010	3:11:39 PM	PH3 valve closed
7/26/2010	3:11:39 PM	SiCl4 pre valve closed
7/26/2010	3:11:39 PM	SiCl4 post valve closed
7/26/2010	3:11:39 PM	Bubbler valve closed
7/26/2010	3:11:39 PM	Main Vac valve opened
7/26/2010	3:11:39 PM	Bypass valve opened
7/26/2010	3:11:39 PM	Helium MFC set to  0.000000
7/26/2010	3:11:39 PM	H2 MFC set to  0.000000
7/26/2010	3:11:39 PM	BCl3 MFC set to  0.000000
7/26/2010	3:11:39 PM	PHl3 MFC set to  0.000000
7/26/2010	3:11:39 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:11:39 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:11:40 PM	Tube furnace set to 0
7/26/2010	3:12:40 PM	H2 valve closed
7/26/2010	3:12:40 PM	BCl3 valve closed
7/26/2010	3:12:40 PM	PH3 valve closed
7/26/2010	3:12:40 PM	SiCl4 pre valve closed
7/26/2010	3:12:40 PM	SiCl4 post valve closed
7/26/2010	3:12:40 PM	Bubbler valve closed
7/26/2010	3:12:40 PM	Helium valve opened
7/26/2010	3:12:40 PM	Main Vac valve opened
7/26/2010	3:12:40 PM	Bypass valve opened
7/26/2010	3:12:40 PM	Helium MFC set to  100.000000
7/26/2010	3:12:40 PM	H2 MFC set to  0.000000
7/26/2010	3:12:40 PM	BCl3 MFC set to  0.000000
7/26/2010	3:12:40 PM	PHl3 MFC set to  0.000000
7/26/2010	3:12:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:12:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:12:40 PM	Tube furnace set to 0
7/26/2010	3:21:40 PM	Helium valve closed
7/26/2010	3:21:40 PM	H2 valve closed
7/26/2010	3:21:40 PM	BCl3 valve closed
7/26/2010	3:21:40 PM	PH3 valve closed
7/26/2010	3:21:40 PM	SiCl4 pre valve closed
7/26/2010	3:21:40 PM	SiCl4 post valve closed
7/26/2010	3:21:40 PM	Bubbler valve closed
7/26/2010	3:21:40 PM	Main Vac valve opened
7/26/2010	3:21:40 PM	Bypass valve opened
7/26/2010	3:21:40 PM	Helium MFC set to  0.000000
7/26/2010	3:21:40 PM	H2 MFC set to  0.000000
7/26/2010	3:21:40 PM	BCl3 MFC set to  0.000000
7/26/2010	3:21:40 PM	PHl3 MFC set to  0.000000
7/26/2010	3:21:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:21:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:21:40 PM	Tube furnace set to 0
7/26/2010	3:22:40 PM	H2 valve closed
7/26/2010	3:22:40 PM	BCl3 valve closed
7/26/2010	3:22:40 PM	PH3 valve closed
7/26/2010	3:22:40 PM	SiCl4 pre valve closed
7/26/2010	3:22:40 PM	SiCl4 post valve closed
7/26/2010	3:22:40 PM	Bubbler valve closed
7/26/2010	3:22:40 PM	Helium valve opened
7/26/2010	3:22:40 PM	Main Vac valve opened
7/26/2010	3:22:40 PM	Bypass valve opened
7/26/2010	3:22:40 PM	Helium MFC set to  100.000000
7/26/2010	3:22:40 PM	H2 MFC set to  0.000000
7/26/2010	3:22:40 PM	BCl3 MFC set to  0.000000
7/26/2010	3:22:40 PM	PHl3 MFC set to  0.000000
7/26/2010	3:22:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:22:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:22:40 PM	Tube furnace set to 0
7/26/2010	3:31:40 PM	Helium valve closed
7/26/2010	3:31:40 PM	H2 valve closed
7/26/2010	3:31:40 PM	BCl3 valve closed
7/26/2010	3:31:40 PM	PH3 valve closed
7/26/2010	3:31:40 PM	SiCl4 pre valve closed
7/26/2010	3:31:40 PM	SiCl4 post valve closed
7/26/2010	3:31:40 PM	Bubbler valve closed
7/26/2010	3:31:40 PM	Main Vac valve opened
7/26/2010	3:31:40 PM	Bypass valve opened
7/26/2010	3:31:40 PM	Helium MFC set to  0.000000
7/26/2010	3:31:40 PM	H2 MFC set to  0.000000
7/26/2010	3:31:40 PM	BCl3 MFC set to  0.000000
7/26/2010	3:31:40 PM	PHl3 MFC set to  0.000000
7/26/2010	3:31:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:31:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:31:40 PM	Tube furnace set to 0
7/26/2010	3:32:40 PM	H2 valve closed
7/26/2010	3:32:40 PM	BCl3 valve closed
7/26/2010	3:32:40 PM	PH3 valve closed
7/26/2010	3:32:40 PM	SiCl4 pre valve closed
7/26/2010	3:32:40 PM	SiCl4 post valve closed
7/26/2010	3:32:40 PM	Bubbler valve closed
7/26/2010	3:32:40 PM	Helium valve opened
7/26/2010	3:32:40 PM	Main Vac valve opened
7/26/2010	3:32:40 PM	Bypass valve opened
7/26/2010	3:32:40 PM	Helium MFC set to  100.000000
7/26/2010	3:32:40 PM	H2 MFC set to  0.000000
7/26/2010	3:32:40 PM	BCl3 MFC set to  0.000000
7/26/2010	3:32:40 PM	PHl3 MFC set to  0.000000
7/26/2010	3:32:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:32:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:32:41 PM	Tube furnace set to 0
7/26/2010	3:41:41 PM	Helium valve closed
7/26/2010	3:41:41 PM	H2 valve closed
7/26/2010	3:41:41 PM	BCl3 valve closed
7/26/2010	3:41:41 PM	PH3 valve closed
7/26/2010	3:41:41 PM	SiCl4 pre valve closed
7/26/2010	3:41:41 PM	SiCl4 post valve closed
7/26/2010	3:41:41 PM	Bubbler valve closed
7/26/2010	3:41:41 PM	Main Vac valve opened
7/26/2010	3:41:41 PM	Bypass valve opened
7/26/2010	3:41:41 PM	Helium MFC set to  0.000000
7/26/2010	3:41:41 PM	H2 MFC set to  0.000000
7/26/2010	3:41:41 PM	BCl3 MFC set to  0.000000
7/26/2010	3:41:41 PM	PHl3 MFC set to  0.000000
7/26/2010	3:41:41 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:41:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:41:41 PM	Tube furnace set to 0
7/26/2010	3:41:42 PM	Run finished at 3:41 PM
7/26/2010	3:42:48 PM	Recipe started at 3:42 PM
7/26/2010	3:42:48 PM	Helium valve closed
7/26/2010	3:42:48 PM	BCl3 valve closed
7/26/2010	3:42:48 PM	PH3 valve closed
7/26/2010	3:42:48 PM	SiCl4 pre valve closed
7/26/2010	3:42:48 PM	SiCl4 post valve closed
7/26/2010	3:42:48 PM	Main Vac valve closed
7/26/2010	3:42:48 PM	Bypass valve closed
7/26/2010	3:42:48 PM	Bubbler valve closed
7/26/2010	3:42:48 PM	H2 valve opened
7/26/2010	3:42:48 PM	Helium MFC set to  0.000000
7/26/2010	3:42:48 PM	H2 MFC set to  500.000000
7/26/2010	3:42:48 PM	BCl3 MFC set to  0.000000
7/26/2010	3:42:48 PM	PHl3 MFC set to  0.000000
7/26/2010	3:42:48 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:42:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:42:48 PM	Tube furnace set to 0
7/26/2010	3:44:05 PM	Helium valve closed
7/26/2010	3:44:05 PM	BCl3 valve closed
7/26/2010	3:44:05 PM	PH3 valve closed
7/26/2010	3:44:05 PM	SiCl4 pre valve closed
7/26/2010	3:44:05 PM	SiCl4 post valve closed
7/26/2010	3:44:05 PM	Main Vac valve closed
7/26/2010	3:44:05 PM	Bypass valve closed
7/26/2010	3:44:05 PM	H2 valve opened
7/26/2010	3:44:05 PM	Bubbler valve opened
7/26/2010	3:44:05 PM	Helium MFC set to  0.000000
7/26/2010	3:44:05 PM	H2 MFC set to  500.000000
7/26/2010	3:44:05 PM	BCl3 MFC set to  0.000000
7/26/2010	3:44:05 PM	PHl3 MFC set to  0.000000
7/26/2010	3:44:05 PM	SiCl4 MFC set to  0.000000
7/26/2010	3:44:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	3:44:05 PM	Tube furnace set to 1000
7/26/2010	4:04:05 PM	Helium valve closed
7/26/2010	4:04:05 PM	BCl3 valve closed
7/26/2010	4:04:05 PM	PH3 valve closed
7/26/2010	4:04:05 PM	Main Vac valve closed
7/26/2010	4:04:05 PM	Bypass valve closed
7/26/2010	4:04:05 PM	H2 valve opened
7/26/2010	4:04:05 PM	SiCl4 pre valve opened
7/26/2010	4:04:05 PM	SiCl4 post valve opened
7/26/2010	4:04:05 PM	Bubbler valve opened
7/26/2010	4:04:05 PM	Helium MFC set to  0.000000
7/26/2010	4:04:05 PM	H2 MFC set to  500.000000
7/26/2010	4:04:05 PM	BCl3 MFC set to  0.000000
7/26/2010	4:04:05 PM	PHl3 MFC set to  0.000000
7/26/2010	4:04:05 PM	SiCl4 MFC set to  50.000000
7/26/2010	4:04:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	4:04:05 PM	Tube furnace set to 1000
7/26/2010	5:04:05 PM	H2 valve closed
7/26/2010	5:04:05 PM	BCl3 valve closed
7/26/2010	5:04:05 PM	PH3 valve closed
7/26/2010	5:04:05 PM	SiCl4 pre valve closed
7/26/2010	5:04:05 PM	SiCl4 post valve closed
7/26/2010	5:04:05 PM	Main Vac valve closed
7/26/2010	5:04:05 PM	Bypass valve closed
7/26/2010	5:04:05 PM	Helium valve opened
7/26/2010	5:04:05 PM	Bubbler valve opened
7/26/2010	5:04:05 PM	Helium MFC set to  500.000000
7/26/2010	5:04:05 PM	H2 MFC set to  0.000000
7/26/2010	5:04:05 PM	BCl3 MFC set to  0.000000
7/26/2010	5:04:05 PM	PHl3 MFC set to  0.000000
7/26/2010	5:04:05 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:04:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:04:05 PM	Tube furnace set to 0
7/26/2010	5:24:04 PM	Helium valve closed
7/26/2010	5:24:04 PM	H2 valve closed
7/26/2010	5:24:04 PM	BCl3 valve closed
7/26/2010	5:24:04 PM	PH3 valve closed
7/26/2010	5:24:04 PM	SiCl4 pre valve closed
7/26/2010	5:24:04 PM	SiCl4 post valve closed
7/26/2010	5:24:04 PM	Main Vac valve closed
7/26/2010	5:24:04 PM	Bypass valve closed
7/26/2010	5:24:04 PM	Bubbler valve closed
7/26/2010	5:24:04 PM	Helium MFC set to  0.000000
7/26/2010	5:24:04 PM	H2 MFC set to  0.000000
7/26/2010	5:24:04 PM	BCl3 MFC set to  0.000000
7/26/2010	5:24:04 PM	PHl3 MFC set to  0.000000
7/26/2010	5:24:04 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:24:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:24:04 PM	Tube furnace set to 0
7/26/2010	5:24:04 PM	Run finished at 5:24 PM
7/26/2010	5:24:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	5:24:07 PM	Recipe started at 5:24 PM
7/26/2010	5:24:07 PM	Helium valve closed
7/26/2010	5:24:07 PM	H2 valve closed
7/26/2010	5:24:07 PM	BCl3 valve closed
7/26/2010	5:24:07 PM	PH3 valve closed
7/26/2010	5:24:07 PM	SiCl4 pre valve closed
7/26/2010	5:24:07 PM	SiCl4 post valve closed
7/26/2010	5:24:07 PM	Main Vac valve closed
7/26/2010	5:24:07 PM	Bubbler valve closed
7/26/2010	5:24:07 PM	Bypass valve opened
7/26/2010	5:24:07 PM	Helium MFC set to  0.000000
7/26/2010	5:24:07 PM	H2 MFC set to  0.000000
7/26/2010	5:24:07 PM	BCl3 MFC set to  0.000000
7/26/2010	5:24:07 PM	PHl3 MFC set to  0.000000
7/26/2010	5:24:07 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:24:07 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:24:07 PM	Tube furnace set to 0
7/26/2010	5:24:32 PM	Helium valve closed
7/26/2010	5:24:32 PM	H2 valve closed
7/26/2010	5:24:32 PM	BCl3 valve closed
7/26/2010	5:24:32 PM	PH3 valve closed
7/26/2010	5:24:32 PM	SiCl4 pre valve closed
7/26/2010	5:24:32 PM	SiCl4 post valve closed
7/26/2010	5:24:32 PM	Bubbler valve closed
7/26/2010	5:24:32 PM	Main Vac valve opened
7/26/2010	5:24:32 PM	Bypass valve opened
7/26/2010	5:24:32 PM	Helium MFC set to  0.000000
7/26/2010	5:24:32 PM	H2 MFC set to  0.000000
7/26/2010	5:24:32 PM	BCl3 MFC set to  0.000000
7/26/2010	5:24:32 PM	PHl3 MFC set to  0.000000
7/26/2010	5:24:32 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:24:32 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:24:32 PM	Tube furnace set to 0
7/26/2010	5:24:32 PM	Run finished at 5:24 PM
7/26/2010	5:24:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	5:39:36 PM	H2 valve opened
7/26/2010	5:39:46 PM	H2 MFC set to  50.000000
7/26/2010	5:40:17 PM	H2 MFC set to  500.000000
7/26/2010	5:50:01 PM	H2 valve closed
7/26/2010	5:50:04 PM	H2 MFC set to  0.000000
7/26/2010	5:50:09 PM	Recipe started at 5:50 PM
7/26/2010	5:50:09 PM	Helium valve closed
7/26/2010	5:50:09 PM	BCl3 valve closed
7/26/2010	5:50:09 PM	PH3 valve closed
7/26/2010	5:50:09 PM	SiCl4 pre valve closed
7/26/2010	5:50:09 PM	SiCl4 post valve closed
7/26/2010	5:50:09 PM	Main Vac valve closed
7/26/2010	5:50:09 PM	Bypass valve closed
7/26/2010	5:50:09 PM	Bubbler valve closed
7/26/2010	5:50:09 PM	H2 valve opened
7/26/2010	5:50:09 PM	Helium MFC set to  0.000000
7/26/2010	5:50:09 PM	H2 MFC set to  500.000000
7/26/2010	5:50:09 PM	BCl3 MFC set to  0.000000
7/26/2010	5:50:09 PM	PHl3 MFC set to  0.000000
7/26/2010	5:50:09 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:50:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:50:09 PM	Tube furnace set to 0
7/26/2010	5:50:24 PM	Helium valve closed
7/26/2010	5:50:24 PM	BCl3 valve closed
7/26/2010	5:50:24 PM	PH3 valve closed
7/26/2010	5:50:24 PM	SiCl4 pre valve closed
7/26/2010	5:50:24 PM	SiCl4 post valve closed
7/26/2010	5:50:24 PM	Main Vac valve closed
7/26/2010	5:50:24 PM	Bypass valve closed
7/26/2010	5:50:24 PM	H2 valve opened
7/26/2010	5:50:24 PM	Bubbler valve opened
7/26/2010	5:50:24 PM	Helium MFC set to  0.000000
7/26/2010	5:50:24 PM	H2 MFC set to  500.000000
7/26/2010	5:50:24 PM	BCl3 MFC set to  0.000000
7/26/2010	5:50:24 PM	PHl3 MFC set to  0.000000
7/26/2010	5:50:24 PM	SiCl4 MFC set to  0.000000
7/26/2010	5:50:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	5:50:24 PM	Tube furnace set to 1000
7/26/2010	6:10:24 PM	Helium valve closed
7/26/2010	6:10:24 PM	BCl3 valve closed
7/26/2010	6:10:24 PM	PH3 valve closed
7/26/2010	6:10:24 PM	Main Vac valve closed
7/26/2010	6:10:24 PM	Bypass valve closed
7/26/2010	6:10:24 PM	H2 valve opened
7/26/2010	6:10:24 PM	SiCl4 pre valve opened
7/26/2010	6:10:24 PM	SiCl4 post valve opened
7/26/2010	6:10:24 PM	Bubbler valve opened
7/26/2010	6:10:24 PM	Helium MFC set to  0.000000
7/26/2010	6:10:24 PM	H2 MFC set to  500.000000
7/26/2010	6:10:24 PM	BCl3 MFC set to  0.000000
7/26/2010	6:10:24 PM	PHl3 MFC set to  0.000000
7/26/2010	6:10:24 PM	SiCl4 MFC set to  50.000000
7/26/2010	6:10:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	6:10:25 PM	Tube furnace set to 1000
7/26/2010	6:20:25 PM	H2 valve closed
7/26/2010	6:20:25 PM	BCl3 valve closed
7/26/2010	6:20:25 PM	PH3 valve closed
7/26/2010	6:20:25 PM	SiCl4 pre valve closed
7/26/2010	6:20:25 PM	SiCl4 post valve closed
7/26/2010	6:20:25 PM	Main Vac valve closed
7/26/2010	6:20:25 PM	Bypass valve closed
7/26/2010	6:20:25 PM	Helium valve opened
7/26/2010	6:20:25 PM	Bubbler valve opened
7/26/2010	6:20:25 PM	Helium MFC set to  500.000000
7/26/2010	6:20:25 PM	H2 MFC set to  0.000000
7/26/2010	6:20:25 PM	BCl3 MFC set to  0.000000
7/26/2010	6:20:25 PM	PHl3 MFC set to  0.000000
7/26/2010	6:20:25 PM	SiCl4 MFC set to  0.000000
7/26/2010	6:20:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	6:20:25 PM	Tube furnace set to 0
7/26/2010	6:40:25 PM	Helium valve closed
7/26/2010	6:40:25 PM	H2 valve closed
7/26/2010	6:40:25 PM	BCl3 valve closed
7/26/2010	6:40:25 PM	PH3 valve closed
7/26/2010	6:40:25 PM	SiCl4 pre valve closed
7/26/2010	6:40:25 PM	SiCl4 post valve closed
7/26/2010	6:40:25 PM	Main Vac valve closed
7/26/2010	6:40:25 PM	Bypass valve closed
7/26/2010	6:40:25 PM	Bubbler valve closed
7/26/2010	6:40:25 PM	Helium MFC set to  0.000000
7/26/2010	6:40:25 PM	H2 MFC set to  0.000000
7/26/2010	6:40:25 PM	BCl3 MFC set to  0.000000
7/26/2010	6:40:25 PM	PHl3 MFC set to  0.000000
7/26/2010	6:40:25 PM	SiCl4 MFC set to  0.000000
7/26/2010	6:40:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	6:40:25 PM	Tube furnace set to 0
7/26/2010	6:40:25 PM	Run finished at 6:40 PM
7/26/2010	6:47:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	6:47:18 PM	Recipe started at 6:47 PM
7/26/2010	6:47:18 PM	Helium valve closed
7/26/2010	6:47:18 PM	H2 valve closed
7/26/2010	6:47:18 PM	BCl3 valve closed
7/26/2010	6:47:18 PM	PH3 valve closed
7/26/2010	6:47:18 PM	SiCl4 pre valve closed
7/26/2010	6:47:18 PM	SiCl4 post valve closed
7/26/2010	6:47:18 PM	Main Vac valve closed
7/26/2010	6:47:18 PM	Bubbler valve closed
7/26/2010	6:47:18 PM	Bypass valve opened
7/26/2010	6:47:18 PM	Helium MFC set to  0.000000
7/26/2010	6:47:18 PM	H2 MFC set to  0.000000
7/26/2010	6:47:18 PM	BCl3 MFC set to  0.000000
7/26/2010	6:47:18 PM	PHl3 MFC set to  0.000000
7/26/2010	6:47:18 PM	SiCl4 MFC set to  0.000000
7/26/2010	6:47:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	6:47:18 PM	Tube furnace set to 0
7/26/2010	6:47:43 PM	Helium valve closed
7/26/2010	6:47:43 PM	H2 valve closed
7/26/2010	6:47:43 PM	BCl3 valve closed
7/26/2010	6:47:43 PM	PH3 valve closed
7/26/2010	6:47:43 PM	SiCl4 pre valve closed
7/26/2010	6:47:43 PM	SiCl4 post valve closed
7/26/2010	6:47:43 PM	Bubbler valve closed
7/26/2010	6:47:43 PM	Main Vac valve opened
7/26/2010	6:47:43 PM	Bypass valve opened
7/26/2010	6:47:43 PM	Helium MFC set to  0.000000
7/26/2010	6:47:43 PM	H2 MFC set to  0.000000
7/26/2010	6:47:43 PM	BCl3 MFC set to  0.000000
7/26/2010	6:47:43 PM	PHl3 MFC set to  0.000000
7/26/2010	6:47:43 PM	SiCl4 MFC set to  0.000000
7/26/2010	6:47:43 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	6:47:43 PM	Tube furnace set to 0
7/26/2010	6:47:44 PM	Run finished at 6:47 PM
7/26/2010	6:47:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	6:47:50 PM	SiCl4 post valve opened
7/26/2010	6:48:00 PM	SiCl4 post valve closed
7/26/2010	6:58:22 PM	SiCl4 post valve opened
7/26/2010	6:58:30 PM	SiCl4 MFC set to  100.000000
7/26/2010	6:58:45 PM	SiCl4 pre valve opened
7/26/2010	6:58:49 PM	SiCl4 pre valve closed
7/26/2010	6:58:53 PM	Helium MFC set to  500.000000
7/26/2010	6:58:55 PM	Helium valve opened
7/26/2010	7:00:41 PM	SiCl4 pre valve opened
7/26/2010	7:20:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	7:20:34 PM	Recipe started at 7:20 PM
7/26/2010	7:20:34 PM	Helium valve closed
7/26/2010	7:20:34 PM	H2 valve closed
7/26/2010	7:20:34 PM	BCl3 valve closed
7/26/2010	7:20:34 PM	PH3 valve closed
7/26/2010	7:20:34 PM	SiCl4 pre valve closed
7/26/2010	7:20:34 PM	SiCl4 post valve closed
7/26/2010	7:20:34 PM	Main Vac valve closed
7/26/2010	7:20:34 PM	Bypass valve closed
7/26/2010	7:20:34 PM	Bubbler valve closed
7/26/2010	7:20:34 PM	Helium MFC set to  0.000000
7/26/2010	7:20:34 PM	H2 MFC set to  0.000000
7/26/2010	7:20:34 PM	BCl3 MFC set to  0.000000
7/26/2010	7:20:34 PM	PHl3 MFC set to  0.000000
7/26/2010	7:20:34 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:20:34 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:20:34 PM	Tube furnace set to 0
7/26/2010	7:20:34 PM	Run finished at 7:20 PM
7/26/2010	7:20:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	7:20:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	7:20:47 PM	Recipe started at 7:20 PM
7/26/2010	7:20:47 PM	Helium valve closed
7/26/2010	7:20:47 PM	H2 valve closed
7/26/2010	7:20:47 PM	BCl3 valve closed
7/26/2010	7:20:47 PM	PH3 valve closed
7/26/2010	7:20:47 PM	SiCl4 pre valve closed
7/26/2010	7:20:47 PM	SiCl4 post valve closed
7/26/2010	7:20:47 PM	Main Vac valve closed
7/26/2010	7:20:47 PM	Bubbler valve closed
7/26/2010	7:20:47 PM	Bypass valve opened
7/26/2010	7:20:47 PM	Helium MFC set to  0.000000
7/26/2010	7:20:47 PM	H2 MFC set to  0.000000
7/26/2010	7:20:47 PM	BCl3 MFC set to  0.000000
7/26/2010	7:20:47 PM	PHl3 MFC set to  0.000000
7/26/2010	7:20:47 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:20:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:20:47 PM	Tube furnace set to 0
7/26/2010	7:20:48 PM	Helium valve closed
7/26/2010	7:20:48 PM	H2 valve closed
7/26/2010	7:20:48 PM	BCl3 valve closed
7/26/2010	7:20:48 PM	PH3 valve closed
7/26/2010	7:20:48 PM	SiCl4 pre valve closed
7/26/2010	7:20:48 PM	SiCl4 post valve closed
7/26/2010	7:20:48 PM	Bubbler valve closed
7/26/2010	7:20:48 PM	Main Vac valve opened
7/26/2010	7:20:48 PM	Bypass valve opened
7/26/2010	7:20:48 PM	Helium MFC set to  0.000000
7/26/2010	7:20:48 PM	H2 MFC set to  0.000000
7/26/2010	7:20:48 PM	BCl3 MFC set to  0.000000
7/26/2010	7:20:48 PM	PHl3 MFC set to  0.000000
7/26/2010	7:20:48 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:20:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:20:48 PM	Tube furnace set to 0
7/26/2010	7:20:48 PM	Run finished at 7:20 PM
7/26/2010	7:20:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	7:22:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	7:22:36 PM	Recipe started at 7:22 PM
7/26/2010	7:22:36 PM	Helium valve closed
7/26/2010	7:22:36 PM	H2 valve closed
7/26/2010	7:22:36 PM	BCl3 valve closed
7/26/2010	7:22:36 PM	PH3 valve closed
7/26/2010	7:22:36 PM	SiCl4 pre valve closed
7/26/2010	7:22:36 PM	SiCl4 post valve closed
7/26/2010	7:22:36 PM	Main Vac valve closed
7/26/2010	7:22:36 PM	Bypass valve closed
7/26/2010	7:22:36 PM	Bubbler valve closed
7/26/2010	7:22:36 PM	Helium MFC set to  0.000000
7/26/2010	7:22:36 PM	H2 MFC set to  0.000000
7/26/2010	7:22:36 PM	BCl3 MFC set to  0.000000
7/26/2010	7:22:36 PM	PHl3 MFC set to  0.000000
7/26/2010	7:22:36 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:22:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:22:37 PM	Tube furnace set to 0
7/26/2010	7:22:37 PM	Run finished at 7:22 PM
7/26/2010	7:22:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/26/2010	7:23:58 PM	Helium MFC set to  500.000000
7/26/2010	7:24:05 PM	Helium valve opened
7/26/2010	7:24:39 PM	Helium valve closed
7/26/2010	7:24:58 PM	Helium valve opened
7/26/2010	7:25:33 PM	Helium valve closed
7/26/2010	7:25:43 PM	Helium valve opened
7/26/2010	7:25:46 PM	Helium valve closed
7/26/2010	7:25:54 PM	Bypass valve opened
7/26/2010	7:25:55 PM	Bypass valve closed
7/26/2010	7:25:56 PM	Bypass valve opened
7/26/2010	7:25:57 PM	Bypass valve closed
7/26/2010	7:25:58 PM	Helium valve opened
7/26/2010	7:26:07 PM	Helium valve closed
7/26/2010	7:26:08 PM	Helium valve opened
7/26/2010	7:26:16 PM	Helium valve closed
7/26/2010	7:26:21 PM	Bypass valve opened
7/26/2010	7:26:21 PM	Bypass valve closed
7/26/2010	7:26:47 PM	Helium valve opened
7/26/2010	7:27:05 PM	Bypass valve opened
7/26/2010	7:27:06 PM	Bypass valve closed
7/26/2010	7:27:10 PM	Bypass valve opened
7/26/2010	7:27:11 PM	Bypass valve closed
7/26/2010	7:27:18 PM	Helium valve closed
7/26/2010	7:27:26 PM	SiCl4 post valve opened
7/26/2010	7:27:32 PM	SiCl4 MFC set to  100.000000
7/26/2010	7:27:34 PM	SiCl4 pre valve opened
7/26/2010	7:28:09 PM	SiCl4 pre valve closed
7/26/2010	7:28:35 PM	SiCl4 post valve closed
7/26/2010	7:28:45 PM	SiCl4 pre valve opened
7/26/2010	7:29:05 PM	SiCl4 pre valve closed
7/26/2010	7:29:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	7:29:27 PM	Recipe started at 7:29 PM
7/26/2010	7:29:27 PM	Helium valve closed
7/26/2010	7:29:27 PM	H2 valve closed
7/26/2010	7:29:27 PM	BCl3 valve closed
7/26/2010	7:29:27 PM	PH3 valve closed
7/26/2010	7:29:27 PM	SiCl4 pre valve closed
7/26/2010	7:29:27 PM	SiCl4 post valve closed
7/26/2010	7:29:27 PM	Main Vac valve closed
7/26/2010	7:29:27 PM	Bubbler valve closed
7/26/2010	7:29:27 PM	Bypass valve opened
7/26/2010	7:29:27 PM	Helium MFC set to  0.000000
7/26/2010	7:29:27 PM	H2 MFC set to  0.000000
7/26/2010	7:29:27 PM	BCl3 MFC set to  0.000000
7/26/2010	7:29:27 PM	PHl3 MFC set to  0.000000
7/26/2010	7:29:27 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:29:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:29:27 PM	Tube furnace set to 0
7/26/2010	7:29:53 PM	Helium valve closed
7/26/2010	7:29:53 PM	H2 valve closed
7/26/2010	7:29:53 PM	BCl3 valve closed
7/26/2010	7:29:53 PM	PH3 valve closed
7/26/2010	7:29:53 PM	SiCl4 pre valve closed
7/26/2010	7:29:53 PM	SiCl4 post valve closed
7/26/2010	7:29:53 PM	Bubbler valve closed
7/26/2010	7:29:53 PM	Main Vac valve opened
7/26/2010	7:29:53 PM	Bypass valve opened
7/26/2010	7:29:53 PM	Helium MFC set to  0.000000
7/26/2010	7:29:53 PM	H2 MFC set to  0.000000
7/26/2010	7:29:53 PM	BCl3 MFC set to  0.000000
7/26/2010	7:29:53 PM	PHl3 MFC set to  0.000000
7/26/2010	7:29:53 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:29:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:29:53 PM	Tube furnace set to 0
7/26/2010	7:29:53 PM	Run finished at 7:29 PM
7/26/2010	7:29:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2010	7:32:51 PM	Recipe started at 7:32 PM
7/26/2010	7:32:51 PM	Helium valve closed
7/26/2010	7:32:51 PM	BCl3 valve closed
7/26/2010	7:32:51 PM	PH3 valve closed
7/26/2010	7:32:51 PM	SiCl4 pre valve closed
7/26/2010	7:32:51 PM	SiCl4 post valve closed
7/26/2010	7:32:51 PM	Main Vac valve closed
7/26/2010	7:32:51 PM	Bypass valve closed
7/26/2010	7:32:51 PM	Bubbler valve closed
7/26/2010	7:32:51 PM	H2 valve opened
7/26/2010	7:32:51 PM	Helium MFC set to  0.000000
7/26/2010	7:32:51 PM	H2 MFC set to  500.000000
7/26/2010	7:32:51 PM	BCl3 MFC set to  0.000000
7/26/2010	7:32:51 PM	PHl3 MFC set to  0.000000
7/26/2010	7:32:51 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:32:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:32:52 PM	Tube furnace set to 0
7/26/2010	7:34:13 PM	Helium valve closed
7/26/2010	7:34:13 PM	BCl3 valve closed
7/26/2010	7:34:13 PM	PH3 valve closed
7/26/2010	7:34:13 PM	SiCl4 pre valve closed
7/26/2010	7:34:13 PM	SiCl4 post valve closed
7/26/2010	7:34:13 PM	Main Vac valve closed
7/26/2010	7:34:13 PM	Bypass valve closed
7/26/2010	7:34:13 PM	H2 valve opened
7/26/2010	7:34:13 PM	Bubbler valve opened
7/26/2010	7:34:13 PM	Helium MFC set to  0.000000
7/26/2010	7:34:13 PM	H2 MFC set to  500.000000
7/26/2010	7:34:13 PM	BCl3 MFC set to  0.000000
7/26/2010	7:34:13 PM	PHl3 MFC set to  0.000000
7/26/2010	7:34:13 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:34:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:34:13 PM	Tube furnace set to 1000
7/26/2010	7:34:13 PM	Helium valve closed
7/26/2010	7:34:13 PM	H2 valve closed
7/26/2010	7:34:13 PM	BCl3 valve closed
7/26/2010	7:34:13 PM	PH3 valve closed
7/26/2010	7:34:13 PM	SiCl4 pre valve closed
7/26/2010	7:34:13 PM	SiCl4 post valve closed
7/26/2010	7:34:13 PM	Main Vac valve closed
7/26/2010	7:34:13 PM	Bubbler valve closed
7/26/2010	7:34:13 PM	Bypass valve closed
7/26/2010	7:34:13 PM	Helium MFC set to  0.000000
7/26/2010	7:34:13 PM	H2 MFC set to  0.000000
7/26/2010	7:34:13 PM	BCl3 MFC set to  0.000000
7/26/2010	7:34:13 PM	PHl3 MFC set to  0.000000
7/26/2010	7:34:13 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:34:13 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:34:13 PM	Tube furnace set to 0
7/26/2010	7:34:13 PM	Baratron reads 740.297493 Torr.  Emergency exit.
7/26/2010	7:35:49 PM	Helium valve closed
7/26/2010	7:35:49 PM	BCl3 valve closed
7/26/2010	7:35:49 PM	PH3 valve closed
7/26/2010	7:35:49 PM	Main Vac valve closed
7/26/2010	7:35:49 PM	Bypass valve closed
7/26/2010	7:35:49 PM	Bubbler valve closed
7/26/2010	7:35:49 PM	H2 valve opened
7/26/2010	7:35:49 PM	SiCl4 pre valve opened
7/26/2010	7:35:49 PM	SiCl4 post valve opened
7/26/2010	7:35:49 PM	Helium MFC set to  0.000000
7/26/2010	7:35:49 PM	H2 MFC set to  500.000000
7/26/2010	7:35:49 PM	BCl3 MFC set to  0.000000
7/26/2010	7:35:49 PM	PHl3 MFC set to  0.000000
7/26/2010	7:35:49 PM	SiCl4 MFC set to  50.000000
7/26/2010	7:35:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:35:50 PM	Tube furnace set to 1000
7/26/2010	7:35:50 PM	Helium valve closed
7/26/2010	7:35:50 PM	H2 valve closed
7/26/2010	7:35:50 PM	BCl3 valve closed
7/26/2010	7:35:50 PM	PH3 valve closed
7/26/2010	7:35:50 PM	SiCl4 pre valve closed
7/26/2010	7:35:50 PM	SiCl4 post valve closed
7/26/2010	7:35:50 PM	Main Vac valve closed
7/26/2010	7:35:50 PM	Bubbler valve closed
7/26/2010	7:35:50 PM	Bypass valve closed
7/26/2010	7:35:50 PM	Helium MFC set to  0.000000
7/26/2010	7:35:50 PM	H2 MFC set to  0.000000
7/26/2010	7:35:50 PM	BCl3 MFC set to  0.000000
7/26/2010	7:35:50 PM	PHl3 MFC set to  0.000000
7/26/2010	7:35:50 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:35:50 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:35:50 PM	Tube furnace set to 0
7/26/2010	7:35:50 PM	Baratron reads 737.235009 Torr.  Emergency exit.
7/26/2010	7:35:55 PM	H2 valve closed
7/26/2010	7:35:55 PM	BCl3 valve closed
7/26/2010	7:35:55 PM	PH3 valve closed
7/26/2010	7:35:55 PM	SiCl4 pre valve closed
7/26/2010	7:35:55 PM	SiCl4 post valve closed
7/26/2010	7:35:55 PM	Main Vac valve closed
7/26/2010	7:35:55 PM	Bypass valve closed
7/26/2010	7:35:55 PM	Bubbler valve closed
7/26/2010	7:35:55 PM	Helium valve opened
7/26/2010	7:35:55 PM	Helium MFC set to  500.000000
7/26/2010	7:35:55 PM	H2 MFC set to  0.000000
7/26/2010	7:35:55 PM	BCl3 MFC set to  0.000000
7/26/2010	7:35:55 PM	PHl3 MFC set to  0.000000
7/26/2010	7:35:55 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:35:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:35:55 PM	Tube furnace set to 0
7/26/2010	7:35:55 PM	Helium valve closed
7/26/2010	7:35:55 PM	H2 valve closed
7/26/2010	7:35:55 PM	BCl3 valve closed
7/26/2010	7:35:55 PM	PH3 valve closed
7/26/2010	7:35:55 PM	SiCl4 pre valve closed
7/26/2010	7:35:55 PM	SiCl4 post valve closed
7/26/2010	7:35:55 PM	Main Vac valve closed
7/26/2010	7:35:55 PM	Bubbler valve closed
7/26/2010	7:35:55 PM	Bypass valve closed
7/26/2010	7:35:55 PM	Helium MFC set to  0.000000
7/26/2010	7:35:55 PM	H2 MFC set to  0.000000
7/26/2010	7:35:55 PM	BCl3 MFC set to  0.000000
7/26/2010	7:35:55 PM	PHl3 MFC set to  0.000000
7/26/2010	7:35:55 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:35:55 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:35:55 PM	Tube furnace set to 0
7/26/2010	7:35:55 PM	Baratron reads 739.276665 Torr.  Emergency exit.
7/26/2010	7:35:56 PM	Helium valve closed
7/26/2010	7:35:56 PM	H2 valve closed
7/26/2010	7:35:56 PM	BCl3 valve closed
7/26/2010	7:35:56 PM	PH3 valve closed
7/26/2010	7:35:56 PM	SiCl4 pre valve closed
7/26/2010	7:35:56 PM	SiCl4 post valve closed
7/26/2010	7:35:56 PM	Main Vac valve closed
7/26/2010	7:35:56 PM	Bypass valve closed
7/26/2010	7:35:56 PM	Bubbler valve closed
7/26/2010	7:35:56 PM	Helium MFC set to  0.000000
7/26/2010	7:35:56 PM	H2 MFC set to  0.000000
7/26/2010	7:35:56 PM	BCl3 MFC set to  0.000000
7/26/2010	7:35:56 PM	PHl3 MFC set to  0.000000
7/26/2010	7:35:56 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:35:56 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:35:56 PM	Tube furnace set to 0
7/26/2010	7:35:56 PM	Run finished at 7:35 PM
7/26/2010	7:36:02 PM	Recipe started at 7:36 PM
7/26/2010	7:36:02 PM	Helium valve closed
7/26/2010	7:36:02 PM	BCl3 valve closed
7/26/2010	7:36:02 PM	PH3 valve closed
7/26/2010	7:36:02 PM	SiCl4 pre valve closed
7/26/2010	7:36:02 PM	SiCl4 post valve closed
7/26/2010	7:36:02 PM	Main Vac valve closed
7/26/2010	7:36:02 PM	Bypass valve closed
7/26/2010	7:36:02 PM	Bubbler valve closed
7/26/2010	7:36:02 PM	H2 valve opened
7/26/2010	7:36:02 PM	Helium MFC set to  0.000000
7/26/2010	7:36:02 PM	H2 MFC set to  500.000000
7/26/2010	7:36:02 PM	BCl3 MFC set to  0.000000
7/26/2010	7:36:02 PM	PHl3 MFC set to  0.000000
7/26/2010	7:36:02 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:36:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:36:02 PM	Tube furnace set to 0
7/26/2010	7:36:06 PM	Helium valve closed
7/26/2010	7:36:06 PM	BCl3 valve closed
7/26/2010	7:36:06 PM	PH3 valve closed
7/26/2010	7:36:06 PM	SiCl4 pre valve closed
7/26/2010	7:36:06 PM	SiCl4 post valve closed
7/26/2010	7:36:06 PM	Main Vac valve closed
7/26/2010	7:36:06 PM	Bypass valve closed
7/26/2010	7:36:06 PM	H2 valve opened
7/26/2010	7:36:06 PM	Bubbler valve opened
7/26/2010	7:36:06 PM	Helium MFC set to  0.000000
7/26/2010	7:36:06 PM	H2 MFC set to  500.000000
7/26/2010	7:36:06 PM	BCl3 MFC set to  0.000000
7/26/2010	7:36:06 PM	PHl3 MFC set to  0.000000
7/26/2010	7:36:06 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:36:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:36:06 PM	Tube furnace set to 1000
7/26/2010	7:36:06 PM	Helium valve closed
7/26/2010	7:36:06 PM	H2 valve closed
7/26/2010	7:36:06 PM	BCl3 valve closed
7/26/2010	7:36:06 PM	PH3 valve closed
7/26/2010	7:36:06 PM	SiCl4 pre valve closed
7/26/2010	7:36:06 PM	SiCl4 post valve closed
7/26/2010	7:36:06 PM	Main Vac valve closed
7/26/2010	7:36:06 PM	Bubbler valve closed
7/26/2010	7:36:06 PM	Bypass valve closed
7/26/2010	7:36:06 PM	Helium MFC set to  0.000000
7/26/2010	7:36:06 PM	H2 MFC set to  0.000000
7/26/2010	7:36:06 PM	BCl3 MFC set to  0.000000
7/26/2010	7:36:06 PM	PHl3 MFC set to  0.000000
7/26/2010	7:36:06 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:36:06 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:36:06 PM	Tube furnace set to 0
7/26/2010	7:36:06 PM	Baratron reads 740.297493 Torr.  Emergency exit.
7/26/2010	7:37:29 PM	Helium valve closed
7/26/2010	7:37:29 PM	BCl3 valve closed
7/26/2010	7:37:29 PM	PH3 valve closed
7/26/2010	7:37:29 PM	Main Vac valve closed
7/26/2010	7:37:29 PM	Bypass valve closed
7/26/2010	7:37:29 PM	Bubbler valve closed
7/26/2010	7:37:29 PM	H2 valve opened
7/26/2010	7:37:29 PM	SiCl4 pre valve opened
7/26/2010	7:37:29 PM	SiCl4 post valve opened
7/26/2010	7:37:29 PM	Helium MFC set to  0.000000
7/26/2010	7:37:29 PM	H2 MFC set to  500.000000
7/26/2010	7:37:29 PM	BCl3 MFC set to  0.000000
7/26/2010	7:37:29 PM	PHl3 MFC set to  0.000000
7/26/2010	7:37:29 PM	SiCl4 MFC set to  50.000000
7/26/2010	7:37:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:37:29 PM	Tube furnace set to 1000
7/26/2010	7:37:29 PM	Helium valve closed
7/26/2010	7:37:29 PM	H2 valve closed
7/26/2010	7:37:29 PM	BCl3 valve closed
7/26/2010	7:37:29 PM	PH3 valve closed
7/26/2010	7:37:29 PM	SiCl4 pre valve closed
7/26/2010	7:37:29 PM	SiCl4 post valve closed
7/26/2010	7:37:29 PM	Main Vac valve closed
7/26/2010	7:37:29 PM	Bubbler valve closed
7/26/2010	7:37:29 PM	Bypass valve closed
7/26/2010	7:37:29 PM	Helium MFC set to  0.000000
7/26/2010	7:37:29 PM	H2 MFC set to  0.000000
7/26/2010	7:37:29 PM	BCl3 MFC set to  0.000000
7/26/2010	7:37:29 PM	PHl3 MFC set to  0.000000
7/26/2010	7:37:29 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:37:29 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:37:29 PM	Tube furnace set to 0
7/26/2010	7:37:29 PM	Baratron reads 738.255837 Torr.  Emergency exit.
7/26/2010	7:37:33 PM	H2 valve closed
7/26/2010	7:37:33 PM	BCl3 valve closed
7/26/2010	7:37:33 PM	PH3 valve closed
7/26/2010	7:37:33 PM	SiCl4 pre valve closed
7/26/2010	7:37:33 PM	SiCl4 post valve closed
7/26/2010	7:37:33 PM	Main Vac valve closed
7/26/2010	7:37:33 PM	Bypass valve closed
7/26/2010	7:37:33 PM	Bubbler valve closed
7/26/2010	7:37:33 PM	Helium valve opened
7/26/2010	7:37:33 PM	Helium MFC set to  500.000000
7/26/2010	7:37:33 PM	H2 MFC set to  0.000000
7/26/2010	7:37:33 PM	BCl3 MFC set to  0.000000
7/26/2010	7:37:33 PM	PHl3 MFC set to  0.000000
7/26/2010	7:37:33 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:37:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:37:33 PM	Tube furnace set to 0
7/26/2010	7:37:34 PM	Helium valve closed
7/26/2010	7:37:34 PM	H2 valve closed
7/26/2010	7:37:34 PM	BCl3 valve closed
7/26/2010	7:37:34 PM	PH3 valve closed
7/26/2010	7:37:34 PM	SiCl4 pre valve closed
7/26/2010	7:37:34 PM	SiCl4 post valve closed
7/26/2010	7:37:34 PM	Main Vac valve closed
7/26/2010	7:37:34 PM	Bubbler valve closed
7/26/2010	7:37:34 PM	Bypass valve closed
7/26/2010	7:37:34 PM	Helium MFC set to  0.000000
7/26/2010	7:37:34 PM	H2 MFC set to  0.000000
7/26/2010	7:37:34 PM	BCl3 MFC set to  0.000000
7/26/2010	7:37:34 PM	PHl3 MFC set to  0.000000
7/26/2010	7:37:34 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:37:34 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:37:34 PM	Tube furnace set to 0
7/26/2010	7:37:34 PM	Baratron reads 740.297493 Torr.  Emergency exit.
7/26/2010	7:37:35 PM	Helium valve closed
7/26/2010	7:37:35 PM	H2 valve closed
7/26/2010	7:37:35 PM	BCl3 valve closed
7/26/2010	7:37:35 PM	PH3 valve closed
7/26/2010	7:37:35 PM	SiCl4 pre valve closed
7/26/2010	7:37:35 PM	SiCl4 post valve closed
7/26/2010	7:37:35 PM	Main Vac valve closed
7/26/2010	7:37:35 PM	Bypass valve closed
7/26/2010	7:37:35 PM	Bubbler valve closed
7/26/2010	7:37:35 PM	Helium MFC set to  0.000000
7/26/2010	7:37:35 PM	H2 MFC set to  0.000000
7/26/2010	7:37:35 PM	BCl3 MFC set to  0.000000
7/26/2010	7:37:35 PM	PHl3 MFC set to  0.000000
7/26/2010	7:37:35 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:37:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:37:35 PM	Tube furnace set to 0
7/26/2010	7:37:36 PM	Run finished at 7:37 PM
7/26/2010	7:38:12 PM	Recipe started at 7:38 PM
7/26/2010	7:38:12 PM	Helium valve closed
7/26/2010	7:38:12 PM	BCl3 valve closed
7/26/2010	7:38:12 PM	PH3 valve closed
7/26/2010	7:38:12 PM	SiCl4 pre valve closed
7/26/2010	7:38:12 PM	SiCl4 post valve closed
7/26/2010	7:38:13 PM	Main Vac valve closed
7/26/2010	7:38:13 PM	Bypass valve closed
7/26/2010	7:38:13 PM	Bubbler valve closed
7/26/2010	7:38:13 PM	H2 valve opened
7/26/2010	7:38:13 PM	Helium MFC set to  0.000000
7/26/2010	7:38:13 PM	H2 MFC set to  500.000000
7/26/2010	7:38:13 PM	BCl3 MFC set to  0.000000
7/26/2010	7:38:13 PM	PHl3 MFC set to  0.000000
7/26/2010	7:38:13 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:38:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:38:13 PM	Tube furnace set to 0
7/26/2010	7:38:16 PM	Helium valve closed
7/26/2010	7:38:16 PM	BCl3 valve closed
7/26/2010	7:38:16 PM	PH3 valve closed
7/26/2010	7:38:16 PM	SiCl4 pre valve closed
7/26/2010	7:38:16 PM	SiCl4 post valve closed
7/26/2010	7:38:16 PM	Main Vac valve closed
7/26/2010	7:38:16 PM	Bypass valve closed
7/26/2010	7:38:16 PM	H2 valve opened
7/26/2010	7:38:16 PM	Bubbler valve opened
7/26/2010	7:38:16 PM	Helium MFC set to  0.000000
7/26/2010	7:38:16 PM	H2 MFC set to  500.000000
7/26/2010	7:38:16 PM	BCl3 MFC set to  0.000000
7/26/2010	7:38:16 PM	PHl3 MFC set to  0.000000
7/26/2010	7:38:16 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:38:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:38:16 PM	Tube furnace set to 1000
7/26/2010	7:58:16 PM	Helium valve closed
7/26/2010	7:58:16 PM	BCl3 valve closed
7/26/2010	7:58:16 PM	PH3 valve closed
7/26/2010	7:58:16 PM	Main Vac valve closed
7/26/2010	7:58:16 PM	Bypass valve closed
7/26/2010	7:58:16 PM	Bubbler valve closed
7/26/2010	7:58:16 PM	H2 valve opened
7/26/2010	7:58:16 PM	SiCl4 pre valve opened
7/26/2010	7:58:16 PM	SiCl4 post valve opened
7/26/2010	7:58:16 PM	Helium MFC set to  0.000000
7/26/2010	7:58:16 PM	H2 MFC set to  500.000000
7/26/2010	7:58:16 PM	BCl3 MFC set to  0.000000
7/26/2010	7:58:16 PM	PHl3 MFC set to  0.000000
7/26/2010	7:58:16 PM	SiCl4 MFC set to  50.000000
7/26/2010	7:58:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:58:16 PM	Tube furnace set to 1000
7/26/2010	7:58:46 PM	Helium valve closed
7/26/2010	7:58:46 PM	H2 valve closed
7/26/2010	7:58:46 PM	BCl3 valve closed
7/26/2010	7:58:46 PM	PH3 valve closed
7/26/2010	7:58:46 PM	SiCl4 pre valve closed
7/26/2010	7:58:46 PM	SiCl4 post valve closed
7/26/2010	7:58:46 PM	Main Vac valve closed
7/26/2010	7:58:46 PM	Bubbler valve closed
7/26/2010	7:58:46 PM	Bypass valve opened
7/26/2010	7:58:46 PM	Helium MFC set to  0.000000
7/26/2010	7:58:46 PM	H2 MFC set to  0.000000
7/26/2010	7:58:46 PM	BCl3 MFC set to  0.000000
7/26/2010	7:58:46 PM	PHl3 MFC set to  0.000000
7/26/2010	7:58:46 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:58:46 PM	Bypass solenoid MFC set to  760.000000
7/26/2010	7:58:46 PM	Tube furnace set to 0
7/26/2010	7:58:46 PM	Baratron reads 900.567492 Torr.  Emergency exit.
7/26/2010	7:59:01 PM	Run aborted at 7:59 PM
7/26/2010	7:59:08 PM	Recipe started at 7:59 PM
7/26/2010	7:59:08 PM	Helium valve closed
7/26/2010	7:59:08 PM	BCl3 valve closed
7/26/2010	7:59:08 PM	PH3 valve closed
7/26/2010	7:59:08 PM	SiCl4 pre valve closed
7/26/2010	7:59:08 PM	SiCl4 post valve closed
7/26/2010	7:59:08 PM	Main Vac valve closed
7/26/2010	7:59:08 PM	Bypass valve closed
7/26/2010	7:59:08 PM	Bubbler valve closed
7/26/2010	7:59:08 PM	H2 valve opened
7/26/2010	7:59:08 PM	Helium MFC set to  0.000000
7/26/2010	7:59:08 PM	H2 MFC set to  500.000000
7/26/2010	7:59:08 PM	BCl3 MFC set to  0.000000
7/26/2010	7:59:08 PM	PHl3 MFC set to  0.000000
7/26/2010	7:59:08 PM	SiCl4 MFC set to  0.000000
7/26/2010	7:59:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	7:59:09 PM	Tube furnace set to 0
7/26/2010	8:00:15 PM	Helium valve closed
7/26/2010	8:00:15 PM	BCl3 valve closed
7/26/2010	8:00:15 PM	PH3 valve closed
7/26/2010	8:00:15 PM	SiCl4 pre valve closed
7/26/2010	8:00:15 PM	SiCl4 post valve closed
7/26/2010	8:00:15 PM	Main Vac valve closed
7/26/2010	8:00:15 PM	Bypass valve closed
7/26/2010	8:00:15 PM	H2 valve opened
7/26/2010	8:00:15 PM	Bubbler valve opened
7/26/2010	8:00:15 PM	Helium MFC set to  0.000000
7/26/2010	8:00:15 PM	H2 MFC set to  500.000000
7/26/2010	8:00:15 PM	BCl3 MFC set to  0.000000
7/26/2010	8:00:15 PM	PHl3 MFC set to  0.000000
7/26/2010	8:00:15 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:00:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:00:15 PM	Tube furnace set to 1000
7/26/2010	8:00:35 PM	Helium valve closed
7/26/2010	8:00:35 PM	BCl3 valve closed
7/26/2010	8:00:35 PM	PH3 valve closed
7/26/2010	8:00:35 PM	Main Vac valve closed
7/26/2010	8:00:35 PM	Bypass valve closed
7/26/2010	8:00:35 PM	H2 valve opened
7/26/2010	8:00:35 PM	SiCl4 pre valve opened
7/26/2010	8:00:35 PM	SiCl4 post valve opened
7/26/2010	8:00:35 PM	Bubbler valve opened
7/26/2010	8:00:35 PM	Helium MFC set to  0.000000
7/26/2010	8:00:35 PM	H2 MFC set to  500.000000
7/26/2010	8:00:35 PM	BCl3 MFC set to  0.000000
7/26/2010	8:00:35 PM	PHl3 MFC set to  0.000000
7/26/2010	8:00:35 PM	SiCl4 MFC set to  50.000000
7/26/2010	8:00:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:00:35 PM	Tube furnace set to 1000
7/26/2010	8:00:41 PM	Run aborted at 8:00 PM
7/26/2010	8:00:41 PM	Helium valve closed
7/26/2010	8:00:41 PM	H2 valve closed
7/26/2010	8:00:41 PM	BCl3 valve closed
7/26/2010	8:00:41 PM	PH3 valve closed
7/26/2010	8:00:41 PM	SiCl4 pre valve closed
7/26/2010	8:00:41 PM	SiCl4 post valve closed
7/26/2010	8:00:41 PM	Bypass valve closed
7/26/2010	8:00:41 PM	Main Vac valve closed
7/26/2010	8:00:41 PM	Bubbler valve closed
7/26/2010	8:00:41 PM	Helium MFC set to  0.000000
7/26/2010	8:00:41 PM	H2 MFC set to  0.000000
7/26/2010	8:00:41 PM	BCl3 MFC set to  0.000000
7/26/2010	8:00:41 PM	PHl3 MFC set to  0.000000
7/26/2010	8:00:41 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:00:42 PM	Tube furnace set to 0
7/26/2010	8:00:44 PM	Recipe started at 8:00 PM
7/26/2010	8:00:45 PM	Helium valve closed
7/26/2010	8:00:45 PM	BCl3 valve closed
7/26/2010	8:00:45 PM	PH3 valve closed
7/26/2010	8:00:45 PM	SiCl4 pre valve closed
7/26/2010	8:00:45 PM	SiCl4 post valve closed
7/26/2010	8:00:45 PM	Main Vac valve closed
7/26/2010	8:00:45 PM	Bypass valve closed
7/26/2010	8:00:45 PM	Bubbler valve closed
7/26/2010	8:00:45 PM	H2 valve opened
7/26/2010	8:00:45 PM	Helium MFC set to  0.000000
7/26/2010	8:00:45 PM	H2 MFC set to  500.000000
7/26/2010	8:00:45 PM	BCl3 MFC set to  0.000000
7/26/2010	8:00:45 PM	PHl3 MFC set to  0.000000
7/26/2010	8:00:45 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:00:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:00:45 PM	Tube furnace set to 0
7/26/2010	8:00:47 PM	Helium valve closed
7/26/2010	8:00:47 PM	BCl3 valve closed
7/26/2010	8:00:47 PM	PH3 valve closed
7/26/2010	8:00:47 PM	SiCl4 pre valve closed
7/26/2010	8:00:47 PM	SiCl4 post valve closed
7/26/2010	8:00:47 PM	Main Vac valve closed
7/26/2010	8:00:47 PM	Bypass valve closed
7/26/2010	8:00:47 PM	H2 valve opened
7/26/2010	8:00:47 PM	Bubbler valve opened
7/26/2010	8:00:47 PM	Helium MFC set to  0.000000
7/26/2010	8:00:47 PM	H2 MFC set to  500.000000
7/26/2010	8:00:47 PM	BCl3 MFC set to  0.000000
7/26/2010	8:00:47 PM	PHl3 MFC set to  0.000000
7/26/2010	8:00:47 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:00:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:00:47 PM	Tube furnace set to 1000
7/26/2010	8:05:22 PM	Helium valve closed
7/26/2010	8:05:22 PM	BCl3 valve closed
7/26/2010	8:05:22 PM	PH3 valve closed
7/26/2010	8:05:22 PM	Main Vac valve closed
7/26/2010	8:05:22 PM	Bypass valve closed
7/26/2010	8:05:22 PM	H2 valve opened
7/26/2010	8:05:22 PM	SiCl4 pre valve opened
7/26/2010	8:05:22 PM	SiCl4 post valve opened
7/26/2010	8:05:22 PM	Bubbler valve opened
7/26/2010	8:05:22 PM	Helium MFC set to  0.000000
7/26/2010	8:05:22 PM	H2 MFC set to  500.000000
7/26/2010	8:05:22 PM	BCl3 MFC set to  0.000000
7/26/2010	8:05:22 PM	PHl3 MFC set to  0.000000
7/26/2010	8:05:22 PM	SiCl4 MFC set to  50.000000
7/26/2010	8:05:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:05:22 PM	Tube furnace set to 1000
7/26/2010	8:25:22 PM	H2 valve closed
7/26/2010	8:25:22 PM	BCl3 valve closed
7/26/2010	8:25:22 PM	PH3 valve closed
7/26/2010	8:25:22 PM	SiCl4 pre valve closed
7/26/2010	8:25:22 PM	SiCl4 post valve closed
7/26/2010	8:25:22 PM	Main Vac valve closed
7/26/2010	8:25:22 PM	Bypass valve closed
7/26/2010	8:25:22 PM	Helium valve opened
7/26/2010	8:25:22 PM	Bubbler valve opened
7/26/2010	8:25:22 PM	Helium MFC set to  500.000000
7/26/2010	8:25:22 PM	H2 MFC set to  0.000000
7/26/2010	8:25:22 PM	BCl3 MFC set to  0.000000
7/26/2010	8:25:22 PM	PHl3 MFC set to  0.000000
7/26/2010	8:25:22 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:25:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:25:22 PM	Tube furnace set to 0
7/26/2010	8:31:00 PM	Helium valve closed
7/26/2010	8:31:00 PM	H2 valve closed
7/26/2010	8:31:00 PM	BCl3 valve closed
7/26/2010	8:31:00 PM	PH3 valve closed
7/26/2010	8:31:00 PM	SiCl4 pre valve closed
7/26/2010	8:31:00 PM	SiCl4 post valve closed
7/26/2010	8:31:00 PM	Main Vac valve closed
7/26/2010	8:31:00 PM	Bypass valve closed
7/26/2010	8:31:00 PM	Bubbler valve closed
7/26/2010	8:31:00 PM	Helium MFC set to  0.000000
7/26/2010	8:31:00 PM	H2 MFC set to  0.000000
7/26/2010	8:31:00 PM	BCl3 MFC set to  0.000000
7/26/2010	8:31:00 PM	PHl3 MFC set to  0.000000
7/26/2010	8:31:00 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:31:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:31:00 PM	Tube furnace set to 0
7/26/2010	8:31:01 PM	Run finished at 8:31 PM
7/26/2010	8:34:47 PM	Recipe started at 8:34 PM
7/26/2010	8:34:48 PM	Helium valve closed
7/26/2010	8:34:48 PM	H2 valve closed
7/26/2010	8:34:48 PM	BCl3 valve closed
7/26/2010	8:34:48 PM	PH3 valve closed
7/26/2010	8:34:48 PM	SiCl4 pre valve closed
7/26/2010	8:34:48 PM	SiCl4 post valve closed
7/26/2010	8:34:48 PM	Main Vac valve closed
7/26/2010	8:34:48 PM	Bubbler valve closed
7/26/2010	8:34:48 PM	Bypass valve opened
7/26/2010	8:34:48 PM	Helium MFC set to  0.000000
7/26/2010	8:34:48 PM	H2 MFC set to  0.000000
7/26/2010	8:34:48 PM	BCl3 MFC set to  0.000000
7/26/2010	8:34:48 PM	PHl3 MFC set to  0.000000
7/26/2010	8:34:48 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:34:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:34:48 PM	Tube furnace set to 0
7/26/2010	8:35:22 PM	Helium valve closed
7/26/2010	8:35:22 PM	H2 valve closed
7/26/2010	8:35:22 PM	BCl3 valve closed
7/26/2010	8:35:22 PM	PH3 valve closed
7/26/2010	8:35:22 PM	SiCl4 pre valve closed
7/26/2010	8:35:22 PM	SiCl4 post valve closed
7/26/2010	8:35:22 PM	Bubbler valve closed
7/26/2010	8:35:22 PM	Main Vac valve opened
7/26/2010	8:35:22 PM	Bypass valve opened
7/26/2010	8:35:22 PM	Helium MFC set to  0.000000
7/26/2010	8:35:22 PM	H2 MFC set to  0.000000
7/26/2010	8:35:22 PM	BCl3 MFC set to  0.000000
7/26/2010	8:35:22 PM	PHl3 MFC set to  0.000000
7/26/2010	8:35:22 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:35:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:35:22 PM	Tube furnace set to 0
7/26/2010	8:36:22 PM	H2 valve closed
7/26/2010	8:36:22 PM	BCl3 valve closed
7/26/2010	8:36:22 PM	PH3 valve closed
7/26/2010	8:36:22 PM	SiCl4 pre valve closed
7/26/2010	8:36:22 PM	SiCl4 post valve closed
7/26/2010	8:36:22 PM	Bubbler valve closed
7/26/2010	8:36:22 PM	Helium valve opened
7/26/2010	8:36:22 PM	Main Vac valve opened
7/26/2010	8:36:22 PM	Bypass valve opened
7/26/2010	8:36:22 PM	Helium MFC set to  100.000000
7/26/2010	8:36:22 PM	H2 MFC set to  0.000000
7/26/2010	8:36:22 PM	BCl3 MFC set to  0.000000
7/26/2010	8:36:22 PM	PHl3 MFC set to  0.000000
7/26/2010	8:36:22 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:36:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:36:22 PM	Tube furnace set to 0
7/26/2010	8:45:22 PM	Helium valve closed
7/26/2010	8:45:22 PM	H2 valve closed
7/26/2010	8:45:22 PM	BCl3 valve closed
7/26/2010	8:45:22 PM	PH3 valve closed
7/26/2010	8:45:22 PM	SiCl4 pre valve closed
7/26/2010	8:45:22 PM	SiCl4 post valve closed
7/26/2010	8:45:22 PM	Bubbler valve closed
7/26/2010	8:45:22 PM	Main Vac valve opened
7/26/2010	8:45:22 PM	Bypass valve opened
7/26/2010	8:45:22 PM	Helium MFC set to  0.000000
7/26/2010	8:45:22 PM	H2 MFC set to  0.000000
7/26/2010	8:45:22 PM	BCl3 MFC set to  0.000000
7/26/2010	8:45:22 PM	PHl3 MFC set to  0.000000
7/26/2010	8:45:22 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:45:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:45:23 PM	Tube furnace set to 0
7/26/2010	8:46:23 PM	H2 valve closed
7/26/2010	8:46:23 PM	BCl3 valve closed
7/26/2010	8:46:23 PM	PH3 valve closed
7/26/2010	8:46:23 PM	SiCl4 pre valve closed
7/26/2010	8:46:23 PM	SiCl4 post valve closed
7/26/2010	8:46:23 PM	Bubbler valve closed
7/26/2010	8:46:23 PM	Helium valve opened
7/26/2010	8:46:23 PM	Main Vac valve opened
7/26/2010	8:46:23 PM	Bypass valve opened
7/26/2010	8:46:23 PM	Helium MFC set to  100.000000
7/26/2010	8:46:23 PM	H2 MFC set to  0.000000
7/26/2010	8:46:23 PM	BCl3 MFC set to  0.000000
7/26/2010	8:46:23 PM	PHl3 MFC set to  0.000000
7/26/2010	8:46:23 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:46:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:46:23 PM	Tube furnace set to 0
7/26/2010	8:55:23 PM	Helium valve closed
7/26/2010	8:55:23 PM	H2 valve closed
7/26/2010	8:55:23 PM	BCl3 valve closed
7/26/2010	8:55:23 PM	PH3 valve closed
7/26/2010	8:55:23 PM	SiCl4 pre valve closed
7/26/2010	8:55:23 PM	SiCl4 post valve closed
7/26/2010	8:55:23 PM	Bubbler valve closed
7/26/2010	8:55:23 PM	Main Vac valve opened
7/26/2010	8:55:23 PM	Bypass valve opened
7/26/2010	8:55:23 PM	Helium MFC set to  0.000000
7/26/2010	8:55:23 PM	H2 MFC set to  0.000000
7/26/2010	8:55:23 PM	BCl3 MFC set to  0.000000
7/26/2010	8:55:23 PM	PHl3 MFC set to  0.000000
7/26/2010	8:55:23 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:55:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:55:23 PM	Tube furnace set to 0
7/26/2010	8:56:23 PM	H2 valve closed
7/26/2010	8:56:23 PM	BCl3 valve closed
7/26/2010	8:56:23 PM	PH3 valve closed
7/26/2010	8:56:23 PM	SiCl4 pre valve closed
7/26/2010	8:56:23 PM	SiCl4 post valve closed
7/26/2010	8:56:23 PM	Bubbler valve closed
7/26/2010	8:56:23 PM	Helium valve opened
7/26/2010	8:56:23 PM	Main Vac valve opened
7/26/2010	8:56:23 PM	Bypass valve opened
7/26/2010	8:56:23 PM	Helium MFC set to  100.000000
7/26/2010	8:56:23 PM	H2 MFC set to  0.000000
7/26/2010	8:56:23 PM	BCl3 MFC set to  0.000000
7/26/2010	8:56:23 PM	PHl3 MFC set to  0.000000
7/26/2010	8:56:23 PM	SiCl4 MFC set to  0.000000
7/26/2010	8:56:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	8:56:23 PM	Tube furnace set to 0
7/26/2010	9:05:23 PM	Helium valve closed
7/26/2010	9:05:23 PM	H2 valve closed
7/26/2010	9:05:23 PM	BCl3 valve closed
7/26/2010	9:05:23 PM	PH3 valve closed
7/26/2010	9:05:23 PM	SiCl4 pre valve closed
7/26/2010	9:05:23 PM	SiCl4 post valve closed
7/26/2010	9:05:23 PM	Bubbler valve closed
7/26/2010	9:05:23 PM	Main Vac valve opened
7/26/2010	9:05:23 PM	Bypass valve opened
7/26/2010	9:05:23 PM	Helium MFC set to  0.000000
7/26/2010	9:05:23 PM	H2 MFC set to  0.000000
7/26/2010	9:05:23 PM	BCl3 MFC set to  0.000000
7/26/2010	9:05:23 PM	PHl3 MFC set to  0.000000
7/26/2010	9:05:23 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:05:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:05:23 PM	Tube furnace set to 0
7/26/2010	9:06:23 PM	H2 valve closed
7/26/2010	9:06:23 PM	BCl3 valve closed
7/26/2010	9:06:23 PM	PH3 valve closed
7/26/2010	9:06:23 PM	SiCl4 pre valve closed
7/26/2010	9:06:23 PM	SiCl4 post valve closed
7/26/2010	9:06:23 PM	Bubbler valve closed
7/26/2010	9:06:23 PM	Helium valve opened
7/26/2010	9:06:23 PM	Main Vac valve opened
7/26/2010	9:06:23 PM	Bypass valve opened
7/26/2010	9:06:23 PM	Helium MFC set to  100.000000
7/26/2010	9:06:23 PM	H2 MFC set to  0.000000
7/26/2010	9:06:23 PM	BCl3 MFC set to  0.000000
7/26/2010	9:06:23 PM	PHl3 MFC set to  0.000000
7/26/2010	9:06:23 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:06:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:06:23 PM	Tube furnace set to 0
7/26/2010	9:10:41 PM	Helium valve closed
7/26/2010	9:10:41 PM	H2 valve closed
7/26/2010	9:10:41 PM	BCl3 valve closed
7/26/2010	9:10:41 PM	PH3 valve closed
7/26/2010	9:10:41 PM	SiCl4 pre valve closed
7/26/2010	9:10:41 PM	SiCl4 post valve closed
7/26/2010	9:10:41 PM	Bubbler valve closed
7/26/2010	9:10:41 PM	Main Vac valve opened
7/26/2010	9:10:41 PM	Bypass valve opened
7/26/2010	9:10:41 PM	Helium MFC set to  0.000000
7/26/2010	9:10:41 PM	H2 MFC set to  0.000000
7/26/2010	9:10:41 PM	BCl3 MFC set to  0.000000
7/26/2010	9:10:41 PM	PHl3 MFC set to  0.000000
7/26/2010	9:10:41 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:10:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:10:41 PM	Tube furnace set to 0
7/26/2010	9:10:42 PM	H2 valve closed
7/26/2010	9:10:42 PM	BCl3 valve closed
7/26/2010	9:10:42 PM	PH3 valve closed
7/26/2010	9:10:42 PM	SiCl4 pre valve closed
7/26/2010	9:10:42 PM	SiCl4 post valve closed
7/26/2010	9:10:42 PM	Bubbler valve closed
7/26/2010	9:10:42 PM	Helium valve opened
7/26/2010	9:10:42 PM	Main Vac valve opened
7/26/2010	9:10:42 PM	Bypass valve opened
7/26/2010	9:10:42 PM	Helium MFC set to  100.000000
7/26/2010	9:10:42 PM	H2 MFC set to  0.000000
7/26/2010	9:10:42 PM	BCl3 MFC set to  0.000000
7/26/2010	9:10:42 PM	PHl3 MFC set to  0.000000
7/26/2010	9:10:42 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:10:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:10:42 PM	Tube furnace set to 0
7/26/2010	9:10:42 PM	Helium valve closed
7/26/2010	9:10:42 PM	H2 valve closed
7/26/2010	9:10:42 PM	BCl3 valve closed
7/26/2010	9:10:42 PM	PH3 valve closed
7/26/2010	9:10:42 PM	SiCl4 pre valve closed
7/26/2010	9:10:42 PM	SiCl4 post valve closed
7/26/2010	9:10:42 PM	Bubbler valve closed
7/26/2010	9:10:42 PM	Main Vac valve opened
7/26/2010	9:10:42 PM	Bypass valve opened
7/26/2010	9:10:42 PM	Helium MFC set to  0.000000
7/26/2010	9:10:42 PM	H2 MFC set to  0.000000
7/26/2010	9:10:42 PM	BCl3 MFC set to  0.000000
7/26/2010	9:10:42 PM	PHl3 MFC set to  0.000000
7/26/2010	9:10:42 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:10:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:10:42 PM	Tube furnace set to 0
7/26/2010	9:10:43 PM	Run finished at 9:10 PM
7/26/2010	9:11:31 PM	Recipe started at 9:11 PM
7/26/2010	9:11:31 PM	Helium valve closed
7/26/2010	9:11:31 PM	BCl3 valve closed
7/26/2010	9:11:31 PM	PH3 valve closed
7/26/2010	9:11:31 PM	SiCl4 pre valve closed
7/26/2010	9:11:31 PM	SiCl4 post valve closed
7/26/2010	9:11:31 PM	Main Vac valve closed
7/26/2010	9:11:31 PM	Bypass valve closed
7/26/2010	9:11:31 PM	Bubbler valve closed
7/26/2010	9:11:31 PM	H2 valve opened
7/26/2010	9:11:31 PM	Helium MFC set to  0.000000
7/26/2010	9:11:31 PM	H2 MFC set to  500.000000
7/26/2010	9:11:31 PM	BCl3 MFC set to  0.000000
7/26/2010	9:11:31 PM	PHl3 MFC set to  0.000000
7/26/2010	9:11:31 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:11:31 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:11:31 PM	Tube furnace set to 0
7/26/2010	9:12:47 PM	Helium valve closed
7/26/2010	9:12:47 PM	BCl3 valve closed
7/26/2010	9:12:47 PM	PH3 valve closed
7/26/2010	9:12:47 PM	SiCl4 pre valve closed
7/26/2010	9:12:47 PM	SiCl4 post valve closed
7/26/2010	9:12:47 PM	Main Vac valve closed
7/26/2010	9:12:47 PM	Bypass valve closed
7/26/2010	9:12:47 PM	H2 valve opened
7/26/2010	9:12:47 PM	Bubbler valve opened
7/26/2010	9:12:47 PM	Helium MFC set to  0.000000
7/26/2010	9:12:47 PM	H2 MFC set to  500.000000
7/26/2010	9:12:47 PM	BCl3 MFC set to  0.000000
7/26/2010	9:12:47 PM	PHl3 MFC set to  0.000000
7/26/2010	9:12:47 PM	SiCl4 MFC set to  0.000000
7/26/2010	9:12:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:12:47 PM	Tube furnace set to 1000
7/26/2010	9:32:47 PM	Helium valve closed
7/26/2010	9:32:47 PM	BCl3 valve closed
7/26/2010	9:32:47 PM	PH3 valve closed
7/26/2010	9:32:47 PM	Main Vac valve closed
7/26/2010	9:32:47 PM	Bypass valve closed
7/26/2010	9:32:47 PM	H2 valve opened
7/26/2010	9:32:47 PM	SiCl4 pre valve opened
7/26/2010	9:32:47 PM	SiCl4 post valve opened
7/26/2010	9:32:47 PM	Bubbler valve opened
7/26/2010	9:32:47 PM	Helium MFC set to  0.000000
7/26/2010	9:32:47 PM	H2 MFC set to  500.000000
7/26/2010	9:32:47 PM	BCl3 MFC set to  0.000000
7/26/2010	9:32:47 PM	PHl3 MFC set to  0.000000
7/26/2010	9:32:47 PM	SiCl4 MFC set to  50.000000
7/26/2010	9:32:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	9:32:47 PM	Tube furnace set to 1000
7/26/2010	10:02:47 PM	H2 valve closed
7/26/2010	10:02:47 PM	BCl3 valve closed
7/26/2010	10:02:47 PM	PH3 valve closed
7/26/2010	10:02:47 PM	SiCl4 pre valve closed
7/26/2010	10:02:47 PM	SiCl4 post valve closed
7/26/2010	10:02:47 PM	Main Vac valve closed
7/26/2010	10:02:47 PM	Bypass valve closed
7/26/2010	10:02:47 PM	Helium valve opened
7/26/2010	10:02:47 PM	Bubbler valve opened
7/26/2010	10:02:47 PM	Helium MFC set to  500.000000
7/26/2010	10:02:47 PM	H2 MFC set to  0.000000
7/26/2010	10:02:47 PM	BCl3 MFC set to  0.000000
7/26/2010	10:02:47 PM	PHl3 MFC set to  0.000000
7/26/2010	10:02:47 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:02:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:02:47 PM	Tube furnace set to 0
7/26/2010	10:10:50 PM	Helium valve closed
7/26/2010	10:10:50 PM	H2 valve closed
7/26/2010	10:10:50 PM	BCl3 valve closed
7/26/2010	10:10:50 PM	PH3 valve closed
7/26/2010	10:10:50 PM	SiCl4 pre valve closed
7/26/2010	10:10:50 PM	SiCl4 post valve closed
7/26/2010	10:10:50 PM	Main Vac valve closed
7/26/2010	10:10:50 PM	Bypass valve closed
7/26/2010	10:10:50 PM	Bubbler valve closed
7/26/2010	10:10:50 PM	Helium MFC set to  0.000000
7/26/2010	10:10:50 PM	H2 MFC set to  0.000000
7/26/2010	10:10:50 PM	BCl3 MFC set to  0.000000
7/26/2010	10:10:50 PM	PHl3 MFC set to  0.000000
7/26/2010	10:10:50 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:10:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:10:50 PM	Tube furnace set to 0
7/26/2010	10:10:50 PM	Run finished at 10:10 PM
7/26/2010	10:10:52 PM	Recipe started at 10:10 PM
7/26/2010	10:10:52 PM	Helium valve closed
7/26/2010	10:10:52 PM	BCl3 valve closed
7/26/2010	10:10:52 PM	PH3 valve closed
7/26/2010	10:10:52 PM	SiCl4 pre valve closed
7/26/2010	10:10:52 PM	SiCl4 post valve closed
7/26/2010	10:10:52 PM	Main Vac valve closed
7/26/2010	10:10:52 PM	Bypass valve closed
7/26/2010	10:10:52 PM	Bubbler valve closed
7/26/2010	10:10:52 PM	H2 valve opened
7/26/2010	10:10:52 PM	Helium MFC set to  0.000000
7/26/2010	10:10:52 PM	H2 MFC set to  500.000000
7/26/2010	10:10:52 PM	BCl3 MFC set to  0.000000
7/26/2010	10:10:52 PM	PHl3 MFC set to  0.000000
7/26/2010	10:10:52 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:10:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:10:52 PM	Tube furnace set to 0
7/26/2010	10:10:54 PM	Helium valve closed
7/26/2010	10:10:54 PM	BCl3 valve closed
7/26/2010	10:10:54 PM	PH3 valve closed
7/26/2010	10:10:54 PM	SiCl4 pre valve closed
7/26/2010	10:10:54 PM	SiCl4 post valve closed
7/26/2010	10:10:54 PM	Main Vac valve closed
7/26/2010	10:10:54 PM	Bypass valve closed
7/26/2010	10:10:54 PM	H2 valve opened
7/26/2010	10:10:54 PM	Bubbler valve opened
7/26/2010	10:10:54 PM	Helium MFC set to  0.000000
7/26/2010	10:10:54 PM	H2 MFC set to  500.000000
7/26/2010	10:10:54 PM	BCl3 MFC set to  0.000000
7/26/2010	10:10:54 PM	PHl3 MFC set to  0.000000
7/26/2010	10:10:54 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:10:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:10:54 PM	Tube furnace set to 1000
7/26/2010	10:23:33 PM	Helium valve closed
7/26/2010	10:23:33 PM	BCl3 valve closed
7/26/2010	10:23:33 PM	PH3 valve closed
7/26/2010	10:23:33 PM	Main Vac valve closed
7/26/2010	10:23:33 PM	Bypass valve closed
7/26/2010	10:23:33 PM	H2 valve opened
7/26/2010	10:23:33 PM	SiCl4 pre valve opened
7/26/2010	10:23:33 PM	SiCl4 post valve opened
7/26/2010	10:23:33 PM	Bubbler valve opened
7/26/2010	10:23:33 PM	Helium MFC set to  0.000000
7/26/2010	10:23:33 PM	H2 MFC set to  500.000000
7/26/2010	10:23:33 PM	BCl3 MFC set to  0.000000
7/26/2010	10:23:33 PM	PHl3 MFC set to  0.000000
7/26/2010	10:23:33 PM	SiCl4 MFC set to  50.000000
7/26/2010	10:23:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:23:33 PM	Tube furnace set to 1000
7/26/2010	10:53:33 PM	H2 valve closed
7/26/2010	10:53:33 PM	BCl3 valve closed
7/26/2010	10:53:33 PM	PH3 valve closed
7/26/2010	10:53:33 PM	SiCl4 pre valve closed
7/26/2010	10:53:33 PM	SiCl4 post valve closed
7/26/2010	10:53:33 PM	Main Vac valve closed
7/26/2010	10:53:33 PM	Bypass valve closed
7/26/2010	10:53:33 PM	Helium valve opened
7/26/2010	10:53:33 PM	Bubbler valve opened
7/26/2010	10:53:33 PM	Helium MFC set to  500.000000
7/26/2010	10:53:33 PM	H2 MFC set to  0.000000
7/26/2010	10:53:33 PM	BCl3 MFC set to  0.000000
7/26/2010	10:53:33 PM	PHl3 MFC set to  0.000000
7/26/2010	10:53:33 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:53:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:53:33 PM	Tube furnace set to 0
7/26/2010	10:53:53 PM	Helium valve closed
7/26/2010	10:53:53 PM	H2 valve closed
7/26/2010	10:53:53 PM	BCl3 valve closed
7/26/2010	10:53:53 PM	PH3 valve closed
7/26/2010	10:53:53 PM	SiCl4 pre valve closed
7/26/2010	10:53:53 PM	SiCl4 post valve closed
7/26/2010	10:53:53 PM	Main Vac valve closed
7/26/2010	10:53:53 PM	Bypass valve closed
7/26/2010	10:53:53 PM	Bubbler valve closed
7/26/2010	10:53:53 PM	Helium MFC set to  0.000000
7/26/2010	10:53:53 PM	H2 MFC set to  0.000000
7/26/2010	10:53:53 PM	BCl3 MFC set to  0.000000
7/26/2010	10:53:53 PM	PHl3 MFC set to  0.000000
7/26/2010	10:53:53 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:53:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:53:54 PM	Tube furnace set to 0
7/26/2010	10:53:54 PM	Run finished at 10:53 PM
7/26/2010	10:54:02 PM	Recipe started at 10:54 PM
7/26/2010	10:54:02 PM	Helium valve closed
7/26/2010	10:54:02 PM	BCl3 valve closed
7/26/2010	10:54:02 PM	PH3 valve closed
7/26/2010	10:54:02 PM	SiCl4 pre valve closed
7/26/2010	10:54:02 PM	SiCl4 post valve closed
7/26/2010	10:54:02 PM	Main Vac valve closed
7/26/2010	10:54:02 PM	Bypass valve closed
7/26/2010	10:54:02 PM	Bubbler valve closed
7/26/2010	10:54:02 PM	H2 valve opened
7/26/2010	10:54:02 PM	Helium MFC set to  0.000000
7/26/2010	10:54:02 PM	H2 MFC set to  500.000000
7/26/2010	10:54:02 PM	BCl3 MFC set to  0.000000
7/26/2010	10:54:02 PM	PHl3 MFC set to  0.000000
7/26/2010	10:54:02 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:54:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:54:02 PM	Tube furnace set to 0
7/26/2010	10:54:04 PM	Helium valve closed
7/26/2010	10:54:04 PM	BCl3 valve closed
7/26/2010	10:54:04 PM	PH3 valve closed
7/26/2010	10:54:04 PM	SiCl4 pre valve closed
7/26/2010	10:54:04 PM	SiCl4 post valve closed
7/26/2010	10:54:04 PM	Main Vac valve closed
7/26/2010	10:54:04 PM	Bypass valve closed
7/26/2010	10:54:04 PM	H2 valve opened
7/26/2010	10:54:04 PM	Bubbler valve opened
7/26/2010	10:54:04 PM	Helium MFC set to  0.000000
7/26/2010	10:54:04 PM	H2 MFC set to  500.000000
7/26/2010	10:54:04 PM	BCl3 MFC set to  0.000000
7/26/2010	10:54:04 PM	PHl3 MFC set to  0.000000
7/26/2010	10:54:04 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:54:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:54:04 PM	Tube furnace set to 1000
7/26/2010	10:56:36 PM	Helium valve closed
7/26/2010	10:56:36 PM	BCl3 valve closed
7/26/2010	10:56:36 PM	PH3 valve closed
7/26/2010	10:56:36 PM	Main Vac valve closed
7/26/2010	10:56:36 PM	Bypass valve closed
7/26/2010	10:56:36 PM	H2 valve opened
7/26/2010	10:56:36 PM	SiCl4 pre valve opened
7/26/2010	10:56:36 PM	SiCl4 post valve opened
7/26/2010	10:56:36 PM	Bubbler valve opened
7/26/2010	10:56:36 PM	Helium MFC set to  0.000000
7/26/2010	10:56:36 PM	H2 MFC set to  500.000000
7/26/2010	10:56:36 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:36 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:36 PM	SiCl4 MFC set to  50.000000
7/26/2010	10:56:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:36 PM	Tube furnace set to 1000
7/26/2010	10:56:40 PM	H2 valve closed
7/26/2010	10:56:40 PM	BCl3 valve closed
7/26/2010	10:56:40 PM	PH3 valve closed
7/26/2010	10:56:40 PM	SiCl4 pre valve closed
7/26/2010	10:56:40 PM	SiCl4 post valve closed
7/26/2010	10:56:40 PM	Main Vac valve closed
7/26/2010	10:56:40 PM	Bypass valve closed
7/26/2010	10:56:40 PM	Helium valve opened
7/26/2010	10:56:40 PM	Bubbler valve opened
7/26/2010	10:56:40 PM	Helium MFC set to  500.000000
7/26/2010	10:56:40 PM	H2 MFC set to  0.000000
7/26/2010	10:56:40 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:40 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:40 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:56:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:40 PM	Tube furnace set to 0
7/26/2010	10:56:41 PM	Helium valve closed
7/26/2010	10:56:41 PM	H2 valve closed
7/26/2010	10:56:41 PM	BCl3 valve closed
7/26/2010	10:56:41 PM	PH3 valve closed
7/26/2010	10:56:41 PM	SiCl4 pre valve closed
7/26/2010	10:56:41 PM	SiCl4 post valve closed
7/26/2010	10:56:41 PM	Main Vac valve closed
7/26/2010	10:56:41 PM	Bypass valve closed
7/26/2010	10:56:41 PM	Bubbler valve closed
7/26/2010	10:56:41 PM	Helium MFC set to  0.000000
7/26/2010	10:56:41 PM	H2 MFC set to  0.000000
7/26/2010	10:56:41 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:41 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:41 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:56:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:41 PM	Tube furnace set to 0
7/26/2010	10:56:41 PM	Run finished at 10:56 PM
7/26/2010	10:56:51 PM	Recipe started at 10:56 PM
7/26/2010	10:56:51 PM	Helium valve closed
7/26/2010	10:56:51 PM	BCl3 valve closed
7/26/2010	10:56:51 PM	PH3 valve closed
7/26/2010	10:56:51 PM	SiCl4 pre valve closed
7/26/2010	10:56:51 PM	SiCl4 post valve closed
7/26/2010	10:56:51 PM	Main Vac valve closed
7/26/2010	10:56:51 PM	Bypass valve closed
7/26/2010	10:56:51 PM	Bubbler valve closed
7/26/2010	10:56:51 PM	H2 valve opened
7/26/2010	10:56:51 PM	Helium MFC set to  0.000000
7/26/2010	10:56:51 PM	H2 MFC set to  500.000000
7/26/2010	10:56:51 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:51 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:51 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:56:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:51 PM	Tube furnace set to 0
7/26/2010	10:56:53 PM	Helium valve closed
7/26/2010	10:56:53 PM	BCl3 valve closed
7/26/2010	10:56:53 PM	PH3 valve closed
7/26/2010	10:56:53 PM	SiCl4 pre valve closed
7/26/2010	10:56:53 PM	SiCl4 post valve closed
7/26/2010	10:56:53 PM	Main Vac valve closed
7/26/2010	10:56:53 PM	Bypass valve closed
7/26/2010	10:56:53 PM	H2 valve opened
7/26/2010	10:56:53 PM	Bubbler valve opened
7/26/2010	10:56:53 PM	Helium MFC set to  0.000000
7/26/2010	10:56:53 PM	H2 MFC set to  500.000000
7/26/2010	10:56:53 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:53 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:53 PM	SiCl4 MFC set to  0.000000
7/26/2010	10:56:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:53 PM	Tube furnace set to 1000
7/26/2010	10:56:56 PM	Helium valve closed
7/26/2010	10:56:56 PM	BCl3 valve closed
7/26/2010	10:56:56 PM	PH3 valve closed
7/26/2010	10:56:56 PM	Main Vac valve closed
7/26/2010	10:56:56 PM	Bypass valve closed
7/26/2010	10:56:56 PM	H2 valve opened
7/26/2010	10:56:56 PM	SiCl4 pre valve opened
7/26/2010	10:56:56 PM	SiCl4 post valve opened
7/26/2010	10:56:56 PM	Bubbler valve opened
7/26/2010	10:56:56 PM	Helium MFC set to  0.000000
7/26/2010	10:56:56 PM	H2 MFC set to  500.000000
7/26/2010	10:56:56 PM	BCl3 MFC set to  0.000000
7/26/2010	10:56:56 PM	PHl3 MFC set to  0.000000
7/26/2010	10:56:56 PM	SiCl4 MFC set to  50.000000
7/26/2010	10:56:56 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	10:56:56 PM	Tube furnace set to 1000
7/26/2010	11:41:46 PM	H2 valve closed
7/26/2010	11:41:46 PM	BCl3 valve closed
7/26/2010	11:41:46 PM	PH3 valve closed
7/26/2010	11:41:46 PM	SiCl4 pre valve closed
7/26/2010	11:41:46 PM	SiCl4 post valve closed
7/26/2010	11:41:46 PM	Main Vac valve closed
7/26/2010	11:41:46 PM	Bypass valve closed
7/26/2010	11:41:46 PM	Helium valve opened
7/26/2010	11:41:46 PM	Bubbler valve opened
7/26/2010	11:41:46 PM	Helium MFC set to  500.000000
7/26/2010	11:41:46 PM	H2 MFC set to  0.000000
7/26/2010	11:41:46 PM	BCl3 MFC set to  0.000000
7/26/2010	11:41:46 PM	PHl3 MFC set to  0.000000
7/26/2010	11:41:46 PM	SiCl4 MFC set to  0.000000
7/26/2010	11:41:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:41:46 PM	Tube furnace set to 0
7/26/2010	11:47:28 PM	Helium valve closed
7/26/2010	11:47:28 PM	H2 valve closed
7/26/2010	11:47:28 PM	BCl3 valve closed
7/26/2010	11:47:28 PM	PH3 valve closed
7/26/2010	11:47:28 PM	SiCl4 pre valve closed
7/26/2010	11:47:28 PM	SiCl4 post valve closed
7/26/2010	11:47:28 PM	Main Vac valve closed
7/26/2010	11:47:28 PM	Bypass valve closed
7/26/2010	11:47:28 PM	Bubbler valve closed
7/26/2010	11:47:28 PM	Helium MFC set to  0.000000
7/26/2010	11:47:28 PM	H2 MFC set to  0.000000
7/26/2010	11:47:28 PM	BCl3 MFC set to  0.000000
7/26/2010	11:47:28 PM	PHl3 MFC set to  0.000000
7/26/2010	11:47:28 PM	SiCl4 MFC set to  0.000000
7/26/2010	11:47:28 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:47:29 PM	Tube furnace set to 0
7/26/2010	11:47:29 PM	Run finished at 11:47 PM
7/26/2010	11:55:33 PM	Recipe started at 11:55 PM
7/26/2010	11:55:33 PM	Helium valve closed
7/26/2010	11:55:33 PM	H2 valve closed
7/26/2010	11:55:33 PM	BCl3 valve closed
7/26/2010	11:55:33 PM	PH3 valve closed
7/26/2010	11:55:33 PM	SiCl4 pre valve closed
7/26/2010	11:55:33 PM	SiCl4 post valve closed
7/26/2010	11:55:33 PM	Main Vac valve closed
7/26/2010	11:55:33 PM	Bubbler valve closed
7/26/2010	11:55:33 PM	Bypass valve opened
7/26/2010	11:55:33 PM	Helium MFC set to  0.000000
7/26/2010	11:55:33 PM	H2 MFC set to  0.000000
7/26/2010	11:55:33 PM	BCl3 MFC set to  0.000000
7/26/2010	11:55:33 PM	PHl3 MFC set to  0.000000
7/26/2010	11:55:33 PM	SiCl4 MFC set to  0.000000
7/26/2010	11:55:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:55:34 PM	Tube furnace set to 0
7/26/2010	11:56:08 PM	Helium valve closed
7/26/2010	11:56:08 PM	H2 valve closed
7/26/2010	11:56:08 PM	BCl3 valve closed
7/26/2010	11:56:08 PM	PH3 valve closed
7/26/2010	11:56:08 PM	SiCl4 pre valve closed
7/26/2010	11:56:08 PM	SiCl4 post valve closed
7/26/2010	11:56:08 PM	Bubbler valve closed
7/26/2010	11:56:08 PM	Main Vac valve opened
7/26/2010	11:56:08 PM	Bypass valve opened
7/26/2010	11:56:08 PM	Helium MFC set to  0.000000
7/26/2010	11:56:08 PM	H2 MFC set to  0.000000
7/26/2010	11:56:08 PM	BCl3 MFC set to  0.000000
7/26/2010	11:56:08 PM	PHl3 MFC set to  0.000000
7/26/2010	11:56:08 PM	SiCl4 MFC set to  0.000000
7/26/2010	11:56:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:56:08 PM	Tube furnace set to 0
7/26/2010	11:57:08 PM	H2 valve closed
7/26/2010	11:57:08 PM	BCl3 valve closed
7/26/2010	11:57:08 PM	PH3 valve closed
7/26/2010	11:57:08 PM	SiCl4 pre valve closed
7/26/2010	11:57:08 PM	SiCl4 post valve closed
7/26/2010	11:57:08 PM	Bubbler valve closed
7/26/2010	11:57:08 PM	Helium valve opened
7/26/2010	11:57:08 PM	Main Vac valve opened
7/26/2010	11:57:08 PM	Bypass valve opened
7/26/2010	11:57:08 PM	Helium MFC set to  100.000000
7/26/2010	11:57:08 PM	H2 MFC set to  0.000000
7/26/2010	11:57:08 PM	BCl3 MFC set to  0.000000
7/26/2010	11:57:08 PM	PHl3 MFC set to  0.000000
7/26/2010	11:57:08 PM	SiCl4 MFC set to  0.000000
7/26/2010	11:57:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2010	11:57:08 PM	Tube furnace set to 0
